GB 50073-2013Code for design of clean room (English PDF)

4.1 Location Selection and General Layout of Clean Room... 10

4.2 Process Layout and Design Coordination... 11

4.3 Personnel and Material Cleaning... 11

4.4 Noise Control... 13

4.5 Microvibration Control... 13

5.1 General Requirement... 14

5.2 Fire Protection and Evacuation... 15

5.3 Interior Decoration... 16

6.1 General Requirement... 17

6.2 Pressure Difference Control of Clean Room... 18

6.3 Air Flow Pattern and Air Supply Volume... 18

6.4 Air Cleaning Treatment... 19

6.5 Heating, Ventilation and Smoke Control... 20

6.6 Air Pipe and Accessories... 20

7.1 General Requirement... 21

7.2 Water Supply... 22

7.3 Drainage... 22

7.4 Fire Water Supply and Fire-fighting Equipment... 22

8.1 General Requirement... 23

8.2 Pipe Material and Valve... 24

8.3 Pipe Connection... 24

8.4 Safety Technology... 25

9.1 Power Distribution... 25

9.2 Illumination... 26

9.3 Communication... 27

9.4 Automatic Control... 27

9.5 Electrostatic Protection and Grounding... 27

Appendix A Performance Test and Certification of the Clean Room or Clean Zone... 29

Appendix B Examples of Fire Hazard Classification for Production Room of Clean Room... 34

Appendix C Requirements for Maintenance and Management of Design of Cleaning

Air-conditioning System... 35

Explanation of Wording in This Code... 36

List of Quoted Standards... 37

Code for Design of Clean Room

1.0.1 This code is formulated with view to making the design of clean room to be

technologically advanced, economic, reliable, safe and qualified as well as comply with

requirements of energy conservation, labor sanitation and environmental protection.

1.0.2 This code is applicable to the design of new-built, extended and rebuilt clean room.

1.0.3 Design of clean room shall the basis of construction installation, maintenance,

examination, test and safe operation.

1.0.4 In addition to this code, the design of clean room shall also comply with requirements

of relevant current standards.

2.0.1 Clean room

The room where the suspended particle concentration in the air is controlled; its

construction and application shall be able to reduce the entering, production and retention of

particles in the room. Other relevant parameters in the room like temperature, humidity and

pressure shall be controlled according to requirements.

2.0.2 Clean zone

Restricted zone where the airborne particle concentration in the air is controlled; its

construction and application shall be able to reduce the entering, production and retention of

particles in the space. Other relevant parameters in the space like temperature, humidity and

pressure shall be controlled according to requirements. Clean zone may be open or closed

type.

2.0.3 Mobile clean booth

Small clean room which may be moved as a whole and may be divided into two types

respectively provided with hoarding made of rigid and flexible materials.

2.0.4 Room for cleaning human body

The room for cleaning human body according to certain procedure before entering into

clean zone.

2.0.5 Room for cleaning material

The room for cleaning material according to certain procedure before entering into clean

zone.

2.0.6 Particle size

The diameter of the globoid which is shown on the adopted particle size tester and

equivalent to the response of the tested particle.

2.0.7 Airborne particle

Solid or liquid airborne particles (with dimension of 0.1~5µm) in the air used for

classification of air cleanliness which are not used to represent the physical property, chemical

property, radioactivity and life feature of airborne particles.

2.0.8 Ultrafine particle

Particles with equivalent diameter less than 0.1µm.

2.0.9 Microparticle

Particles with equivalent diameter greater than 5µm.

3.0.1 The classification of air cleanliness of airborne particles in clean room (zone) shall

meet the following requirements.

3.0.2 The state (as-built, at-rest and operational) of classification of air cleanliness shall be

negotiated with the Owner.

3.0.3 The air cleanliness shall be measured according to the requirements of Appendix A in

this code.

3.0.4 Where the microorganism or chemical pollutant is controlled by the process

requirements, the corresponding concentration limit of microorganism and chemical pollutant

shall be determined for each classification of air cleanliness according to the process

characteristics.

4.1 Location Selection and General Layout of Clean Room

4.1.1 The location selection of clean room shall meet the following requirements and shall

be determined after economic and technical comparison.

4.1.2 For location selection of clean room with microvibration control requirements,

vibration effect of current vibration source nearby shall be measured, and shall be determined

after analytically comparing with permissible vibration value of precise equipment or

instrument.

4.1.3 The minimum distance between fresh air inlet of clean room and the traffic artery shall

be greater than 50m.

4.1.4 Circular fire lane shall be set around clean room; fire lane may also be arranged along

the two long sides of the clean room.

4.1.5 Materials with good integral performance and low dust production shall be adopted

for road surface around the clean room.

4.1.6 Greening shall be carried out around the clean room. lawn may be planted, and plants

harmful to production shall be forbidden; the greening shall not obstruct the firefighting work.

4.2 Process Layout and Design Coordination

4.3 Personnel and Material Cleaning

4.4 Noise Control

4.5 Microvibration Control

5.1 General Requirement

5.1.1 The construction plan and space layout of the clean room should be properly flexible.

The large space and large span column grid should be adopted for the major structure.

5.1.2 The type selection for materials of the enclosing structure of clean room shall meet the

requirements of thermal insulation, fire protection, moisture protection and dust control.

5.2 Fire Protection and Evacuation

5.2.1 The clean room shall reach Grade II fire resistance at least.

5.3 Interior Decoration

5.3.1 As for the enclosing structure and interior decoration of clean room, the material shall

be equipped with good air tightness, small deformation in changed temperature and humidity

as well as pollutant concentration in accordance with the specified limit of the current

relevant national standards. The decoration material and sealing material shall not release

materials which are harmful to the quality of the product.

5.3.2 The wall and ceiling decoration in the clean room shall meet the following

requirements.

5.3.3 The ground design of the clean room shall meet the following requirements.

5.3.4 The surface of technical interlayer wall and ceiling of clean room should be flat and

smooth; water-proof, moisture protection or mould resistance measures shall be taken for

underground technical interlayer.

5.3.9 Light wall board shall be adopted for the wallboard and ceiling in the clean room with

cleanliness classification above Grade 8.

5.3.10 The combustion performance of interior decoration material must meet the relevant

requirements of the current national standard "Code for Fire Prevention in Design of Interior

Decoration of Buildings" (GB 50222); the smoke density grade of the decoration material

shall not be greater than 50, and the test on smoke density grade of material shall meet the

relevant requirements of current national standard "Test Method for Density of Smoke from

the Burning or Decomposition of Building Materials" (GB/T 8627).

6.1 General Requirement

6.1.1 The classification of air cleanliness in all clean rooms shall meet the clean

requirements of production process on production environment.

6.1.2 The air flow pattern shall be selected according to different requirements of

classification of air cleanliness.

6.2 Pressure Difference Control of Clean Room

6.2.1 Certain pressure difference must be maintained between clean room (zone) and

surrounding space, and positive or negative pressure shall be determined according to process

requirements.

6.3 Air Flow Pattern and Air Supply Volume

6.3.1 The design of air flow pattern shall meet the following requirements.

6.3.2 The air supply volume in clean room shall be the maximum of the following three values.

6.4 Air Cleaning Treatment

6.4.1 The selection, arrangement and installation of air filter shall meet the following

requirements.

6.4.2 For cleaning air-conditioning system in a relatively large clean room, the concentrated

air cleaning treatment shall be carried out for its fresh air.

6.4.3 The return air shall be reasonably applied in the design of cleaning air-conditioning system.

6.5 Heating, Ventilation and Smoke Control

6.6 Air Pipe and Accessories

7.1 General Requirement

7.1.1 The main water supply and drainage pipe in clean room shall be laid in technical

interlayer or tunnel, or can be laid underground. The pipe in clean room shall be concealed

and the pipe irrelevant with this room shall not cross it.

7.1.2 Where there is potential moisture condensation on the outer surface of pipe, protection

measures shall be taken. The outer surface of anti-condensing layer shall be smooth and easy

to clean, and shall not pollute the clean room.

7.2 Water Supply

7.2.1 The water supply system in clean room shall be set separately and shall meet the

requirements on quality, temperature, pressure and volume of water used for production,

living and fire-fighting. The pipe shall be designed with margin to fit process change.

7.2.2 The purity water supply pipe with high quality requirement shall adopt circulating

water supply and shall meet the following requirements.

7.3 Drainage

7.4 Fire Water Supply and Fire-fighting Equipment

7.4.1 Clean room must be equipped with fire water supply facility whose arrangement and

design shall be determined according to factors such as fire risk of production, fire resistance

rating and volume of building.

7.4.2 The arrangement of fire water supply and fixed fire-fighting equipment of clean room

shall meet the relevant requirements current national standard "Code of Design on Building

Fire Protection and Prevention" (GB 50016).

8.1 General Requirement

8.1.1 The laying of industrial pipe in clean room (zone) shall meet the following requirements.

8.1.2 The design of industrial pipe in clean room (zone) shall meet relevant requirements of

the current national standard "Design Code for Industrial Metallic Piping" (GB 50316).

8.1.3 The design of industrial pipe shall meet the following requirements.

8.2 Pipe Material and Valve

8.2.1 The material and valve of industrial pipe shall be selected according to the

physicochemical properties and service condition of transmitted material, and shall meet the

requirements of production process and handling characteristics. Finally it shall be

determined after technical and economical comparison.

8.2.2 The selection of high-purity gas pipe and valve shall meet the requirements of

production process and the following requirements.

8.2.3 Where the dew point of dry compressed air is lower than -70 degrees C, stainless steel pipe

with brilliant-polished inner wall shall be adopted; where the dew point is lower than -40 degrees C,

stainless steel pipe or hot dip galvanizing seamless steel pipe shall be adopted. For valve,

bellows valve or ball valve shall be adopted.

8.2.4 The material of valve shall match with that of connecting pipe.

8.3 Pipe Connection

8.3.1 The connection of industrial pipe shall meet the following requirements.

8.4 Safety Technology

8.4.1 The combustible gas alarm device and accident air exhaust device shall be set on the

following parts, and the alarm device shall be interlocked with corresponding accident air

exhaust machine.

8.4.2 For combustible gas pipe, the following safety technical measures shall be taken.

8.4.3 The following safety technical measures shall be adopted for oxygen pipe.

9.1 Power Distribution

9.1.1 The low-voltage power distribution in clean room shall be designed as 220/380V. The

live conductor system shall adopt single-phase two-wire system, three-phase three-wire

system and three-phase four-wire system. The system ground shall adopt TN-S or TN-C-S system.

9.1.2 The electric load grade and power supply requirement in clean room shall be

determined according to relevant requirements of the current national standard "Code for

Design of Electric Power Supply Systems" (GB 50052) and production process.

9.1.3 The power supply and distribution design for electric fire-fighting equipment in clean

rooms shall be carried out according to relevant requirements of current national standard

"Code of Design on Building Fire Protection and Prevention" (GB 50016).

9.2 Illumination

9.2.1 The illuminating source in clean rooms shall be high-efficient fluorescent lamp. If

there is special requirement on process or the illuminance cannot reach the design

requirement, other types of illuminating sources shall be adopted.

9.2.2 The lamp for general illumination in clean room shall be installed on ceiling in an

exposed way. Where the lamp is embedded into the ceiling for concealed installation, reliable

sealing measure shall be taken for installation seam.

9.2.5 The arrangement of standby illuminating in clean rooms shall meet the following

requirements.

9.2.7 The illuminating fixture and electric circuit of room with explosion risk in clean room

shall be designed according to relevant requirements of the current national standard

"Electrical Installations Design Code for Explosive Atmospheres and Fire Hazard" (GB 50058).

9.3 Communication

9.4 Automatic Control

9.5 Electrostatic Protection and Grounding

9.5.1 The electrostatic protection measure shall be taken in clean rooms according to

process and production requirements.

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