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GB/T 36653-2018Electronic grade trimethylaluminium (English PDF)

电子级三甲基铝

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Issued by

SAMR; SAC

Level / Type

National · Recommended

Issue date

September 17, 2018

Implementation date

January 1, 2019

Scope

GB/T 36653-2018 is the English-translated version of 电子级三甲基铝.

GB/T 36653-2018 covers electronic grade trimethylaluminium (C3H9Al), used mainly to grow compound semiconductor thin film materials. It applies to trimethylaluminium made by chemical synthesis routes such as alkyl exchange and sodium reduction and then purified.

The standard sets the technical requirements, test methods, inspection rules, packaging, marking, transport, storage and safety of the product.

Its requirements table fixes a minimum purity of 99.99995 % by mass and maximum contents, in µg/g, for metal and other impurity elements such as silver, boron, barium, beryllium, calcium, cadmium, cobalt and chromium.

Normative references include rules for sampling industrial chemicals, electronic grade water and the transport, storage and labelling of dangerous chemicals. It was issued on 17 September 2018 and has applied since 1 January 2019.

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Document preview — GB/T 36653-2018

National Standard of the People's Republic of China

ICS: 71.100.20
Classification: G 86

Issued by: State Administration for Market Regulation; Standardization Administration of the PRC

Foreword
1 Scope
2 Normative references
3 Technical requirements

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009.

1 Scope

This standard specifies the technical requirements, test methods, inspection rules, packaging, marking, transportation, storage and safety of trimethylaluminum.

This standard is applicable to trimethylaluminum prepared by three chemical synthesis methods, such as alkyl exchange method and sodium reduction method, and purified. The main product Used to grow compound semiconductor thin film materials and the like.

Molecular formula. C3H9Al

Relative molecular mass. 72.09 (according to the international relative atomic mass in 2013)

2 Normative references

The following documents are indispensable for the application of this document. For dated references, only dated versions apply to this document. For undated references, the latest edition (including all amendments) applies to this document.

GB 190 dangerous goods packaging mark

GB/T 3723 General rules for sampling safety of industrial chemical products

GB/T 6680 Liquid Chemical Product Sampling General

GB/T 11446.1 electronic grade water

GB 12463 General technical conditions for the transport of dangerous goods

GB 15258 Chemical Safety Labeling Regulations

GB 15603 General rules for the storage of common chemical dangerous goods

GB 50073 clean factory design specification

3 Technical requirements

The technical indicators of trimethylaluminum should meet the requirements of Table 1.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.

Referenced standards

Normative references

Similar standards

GB/T 31058-2026|GB/T 31986-2026|GB/T 31987-2026|GB/T 32386-2026|GB/T 35995-2026|GB/T 47882-2026

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