GB/T 32386-2026Electronic gas - Tungsten hexafluoride (English PDF)

6.1.1 Calculation of the purity of tungsten hexafluoride at grades I, II, and III

6.1.1.1 Total impurity content The total impurity content is calculated according to formula (1).

6.1.1.2 Purity The purity of tungsten hexafluoride is calculated according to formula (2).

6.1.2.2 Purity The purity of tungsten hexafluoride is calculated according to formula (4).

6.2 Determination of the contents of carbon tetrafluoride, oxygen, nitrogen, carbon monoxide, carbon dioxide, and sulfur hexafluoride

6.2.1 Determination Method The determination of carbon tetrafluoride, oxygen, nitrogen, carbon monoxide, carbon dioxide, and carbon hexafluoride in tungsten hexafluoride according to the method specified in GB/T 28726 is as follows: Sulfur content. Other equivalent methods may be used for determination. In case of disagreement regarding the determination results, arbitration shall be conducted according to the methods specified in GB/T 28726. method.

6.2.2 Pre-separation column

6.2.2.1 Pre-separation column I. A 3m long, 2mm inner diameter 316L stainless steel tube, filled with modified particles with a particle size of 0.18mm~0.25mm. Carbon molecular sieves, or other equivalent pre-separation columns, can be used.

6.2.2.2 Pre-separation column II. A 6m long stainless steel tube with an inner diameter of 2mm, filled with a stationary phase containing 0.18mm~0.25mm particle size particles. Polytetrafluoroethylene monomer of vinyl chloride, or other equivalent chromatographic columns.

6.2.3 Chromatographic column

6.2.3.1 Column I. A stainless steel tube 1.5m long and 2mm inner diameter, packed with 5A molecules with a particle size of 0.18mm~0.25mm. A sieve, or other equivalent chromatographic column. This column is used to determine the content of oxygen, argon, nitrogen, and carbon monoxide.

6.2.3.2 Chromatographic column II. a 2m long stainless steel tube with an inner diameter of 2mm, packed with polymer particles with a particle size of 0.18mm~0.25mm. (Ethylstyrene and divinylbenzene copolymer), or other equivalent chromatographic columns. This column is used for the determination of carbon dioxide, carbon tetrafluoride, and sulfur hexafluoride. content.

6.2.4 Standard Samples When determining grade IV tungsten hexafluoride, the component content in the standard sample should be similar to the corresponding content in the test sample, and the equilibrium gas should be high purity. Helium should comply with the requirements of GB/T 4844. When determining tungsten hexafluoride at grades I, II, and III, the component (molar fraction) content in the standard sample should preferably be 1×10^-6 to 5×10^-6. The helium gas is of high purity and should comply with the requirements of GB/T 4844.

6.2.5 Referenced Gas Flow Diagram The reference gas path flow diagram is shown in Appendix A.

6.3 Determination of silicon tetrafluoride and hydrogen fluoride content

6.3.1 Measurement Method The content of silicon tetrafluoride and hydrogen fluoride in tungsten hexafluoride should be determined according to the method specified in GB/T 46384.1.Other equivalent methods can be used for determination. In the event of any dispute regarding the test results, the method specified in GB/T 46384.1 shall be the arbitration method.

6.3.2 Measurement conditions The reference measurement conditions are as follows:

---Optical path length not less than 5m.

---Silicon tetrafluoride characteristic peak wavenumber. 1790cm-1~1840cm-1.

---Characteristic peak wavenumber of hydrogen fluoride. 3980cm-1~4120cm-1.

---Resolution. 0.5cm-1~2cm-1.

---Ambient temperature. 18°C~25°C.

---Ambient relative humidity. <=60%.

---Other measurement conditions shall be performed in accordance with the instrument instruction manual.

6.3.3 Standard Samples

6.3.3.1 When determining the silicon tetrafluoride content in tungsten hexafluoride, it is advisable to have five gaseous standard samples with different component contents, and the silicon tetrafluoride content... The mole fractions are approximately 0.1 × 10^-6, 0.5 × 10^-6, 1 × 10^-6, 5 × 10^-6, and 10 × 10^-6, respectively. The equilibrium gas is high-purity helium and should meet the following requirements. The provisions of GB/T 4844.

6.3.3.2 When determining the hydrogen fluoride content in grade I, II, and III tungsten hexafluoride, it is advisable to have three gaseous standard samples with different component contents. The hydrogen content (mole fraction) is approximately 0.1×10^-6, 1×10^-6, and 5×10^-6, respectively. The balance gas is high-purity helium and should conform to GB/T 4844. According to the regulations.

6.3.3.3 When determining the hydrogen fluoride content in grade IV tungsten hexafluoride, it is advisable to have five gaseous standard samples with different component contents. The mole fractions are approximately 50 × 10^-6, 100 × 10^-6, 300 × 10^-6, 500 × 10^-6, and 1000 × 10^-6, respectively. The equilibrium gas is high-purity helium. It conforms to the requirements of GB/T 4844.

6.4 Determination of the content of metallic elements and other elements Perform in accordance with the provisions of GB/T 34972.

6.5 Exhaust Gas Treatment During the measurement, exhaust gas treatment measures should be in place to prevent tungsten hexafluoride from polluting the environment.

7.1 Sampling, Judgment and Re-inspection of Bottled Tungsten Hexafluoride

7.1.1 Tungsten hexafluoride produced continuously and stably on the same production line constitutes a batch, and the quality of each batch does not exceed 5t.

7.1.2 The numerical values of the measurement results shall be rounded and the limit values shall be determined in accordance with the rounding comparison method specified in GB/T 8170.

7.1.3 Grade IV bottled tungsten hexafluoride shall be randomly sampled and inspected according to the sampling quantity specified in Table

3.When the inspection results of each bottle in the sampled specimens are... If all test results meet the technical requirements for this level, the batch of products is deemed (qualified). If any one of the test results fails to meet the technical requirements for this level, the batch is deemed (qualified). If required, double the random sampling should be performed again from the same batch of products for inspection. If the inspection results meet the technical requirements of that level, the remaining products in that batch are deemed acceptable. All products are qualified; if any indicator still fails to meet the technical requirements of this level, the batch of products is deemed unqualified.

7.1.4 All other grades of tungsten hexafluoride shall be inspected and accepted individually. When the inspection results all meet the technical requirements of the corresponding grade of the product, then... The product is deemed (qualified) if any indicator in the inspection results fails to meet the technical requirements for the corresponding product level. The product is substandard.

7.2 Sampling and Judgment of Tungsten Hexafluoride Loaded in Containers and Tankers For tungsten hexafluoride products packaged in containers or tank trucks, each product should be inspected and accepted individually. For Grade I, II, and III tungsten hexafluoride, when inspection... If the test results all meet the requirements of Tables 1 and 2, the product is deemed qualified. If the test results do not meet the requirements of Tables 1 and 2, the product is deemed unqualified. The product is substandard. For Grade IV tungsten hexafluoride, the product is considered (qualified) if all test results meet the requirements of Table

1.If the test results do not meet the requirements... If the conditions specified in Table 1 are not met, the product is deemed unqualified.

8.1 Marking

8.1.1 Tungsten hexafluoride shall be accompanied by a product quality certificate upon leaving the factory, which shall include at least the following.

---Product name, manufacturer's name, hazardous chemical production license number;

---Production date or batch number, and shelf life;

---Fill weight (kg);

---This document number and the purity of tungsten hexafluoride.

8.1.2 The packaging container should be marked with the words "Tungsten Hexafluoride Electronic Gas".

8.1.3 The packaging markings for tungsten hexafluoride shall comply with the provisions of GB 190, the color markings shall comply with the provisions of GB/T 7144, and the labels shall comply with... The provisions of GB 15258 and GB/T 16804.

8.2 Packaging, Transportation and Storage

8.2.1 The gas cylinders for packaging tungsten hexafluoride shall comply with the provisions of GB/T 5099 (all parts) or GB/T 32566 or GB/T 33145.

8.2.2 The filling and storage of tungsten hexafluoride shall comply with the provisions of GB/T 14193.1 and TSG

23.The safety management regulations for filling and storage are as follows: Regulations on the Safety Management of Hazardous Chemicals and Regulations on the Safety Supervision of Special Equipment.

8.2.3 The filling coefficient of tungsten hexafluoride is

8.2.4 Gas cylinders with internal surface treatment should be used, and the treated cylinders should comply with the provisions of this document. The connection method of the cylinder valve outlet should preferably be... Use CGADISS638, CGA670, or JISS-22.

8.2.5 Leakage and contamination of the bottle opening should be prevented.

8.2.6 Tungsten hexafluoride products should be stored in a cool, dry, and well-ventilated warehouse, and should not be exposed to direct sunlight or heat sources.

8.3 Security Information Safety information for tungsten hexafluoride is provided in Appendix B.