Valid

GB/T 31986-2026Electronic gas - Octafluoropropane (English PDF)

电子气体 八氟丙烷

Open the GB/T 31986-2026 preview as PDF

Preview — first pages of GB/T 31986-2026 (full document: 24 pages)

This is a limited preview

Buy now to download the full PDF (24 pages)

Issued by

SAMR; SAC

Level / Type

National · Recommended

Issue date

April 30, 2026

Implementation date

November 1, 2026

Scope

GB/T 31986-2026 is the English-translated version of 电子气体 八氟丙烷.

GB/T 31986-2026 is the Chinese national standard covering octafluoropropane of semiconductor grade - an etching gas used to cut features in dielectric layers, and a very potent greenhouse gas, which is why its purity and its abatement are both regulated. It replaces GB/T 31986-2015 and has been in force since 1 November 2026, with GB/T 31058-2026 on silicon tetrafluoride. It was issued on 30 April 2026 and takes effect on 1 November 2026, replacing GB/T 31986-2015. The document is under the responsibility of the Standardization Administration of China. This page is published from the official record of the 2026 edition; the clause text of a standard this recent is not yet in circulation, and the figures, limits and tables it contains are those of the document itself, delivered in full with the English translation.

Document preview — GB/T 31986-2026

National Standard of the People's Republic of China

ICS
71.100.20
Classification
G 86
Replacing
GB/T 31986-2015

Issued by: State Administration for Market Regulation; Standardization Administration of the PRC

Contents

  • 6 Test Methods
  • 6.1 Purity of octafluoropropane
  • 6.1.1 Total impurity content
  • 6.2.2 Pre-separation column
  • 6.2.3 Chromatographic column
  • 6.4 Determination of Hydrogen Fluoride Content
  • 7 Inspection Rules
  • 7.1 Sampling, Judgment and Retesting of Bottled Octafluoropropane
  • 8 Marking, Packaging, Transport, Storage and Safety Information
  • 8.1 Marking
  • 8.2 Packaging, Transportation and Storage

Foreword

This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part

1.Structure and Drafting Rules of Standardization Documents". Drafting. This document replaces GB/T 31986-2015 "Octaflopram for Electronic Industry". Compared with GB/T 31986-2015, the following changes are made. Aside from structural adjustments and editorial changes, the main technical changes are as follows:

a) The scope has been changed (see Chapter 1, Chapter 1 of the.2015 edition);

b) The technical requirements for octafluoropropane have been revised (see Chapter 4, Chapter 3 of the.2015 edition);

c) The sampling requirements have been changed (see Chapter 5,

4.1.2 of the.2015 edition);

d) The method for calculating purity has been changed (see 6.1,

4.2 of the.2015 edition);

e) The following parameters have been changed. oxygen (argon), nitrogen, carbon monoxide, carbon dioxide, methane, carbon tetrafluoride, hexafluoroethane, hexafluoropropylene, heptafluoropropane, and octafluorocarbon. Methods for determining cyclobutane content (see 6.2,

4.4 of the.2015 edition);

f) A method for determining the content of pentachlorofluoroethane has been added (see 6.2);

g) The method for determining moisture content has been changed (see 6.3,

4.5 in the.2015 edition);

h) The method for determining hydrogen fluoride content has been changed (see 6.4,

6.1.1 Total impurity content

6.1.2 Purity The purity of octafluoropropane is calculated according to formula (2).

6.2 Oxygen, Argon, Nitrogen, Carbon Monoxide, Carbon Dioxide, Methane, Carbon Tetrafluoride, Pentachlorofluoroethane, Hexafluoroethane, Hexafluoropropylene, Heptafluoropropane, Determination of octafluorocyclobutane content

6.2.1 Determination Method The determination of oxygen, argon, nitrogen, carbon monoxide, carbon dioxide, methane, carbon tetrafluoride, and chlorine in octafluoropropane according to the method specified in GB/T 28726 Contents of pentafluoroethane, hexafluoroethane, hexafluoropropylene, heptafluoropropane, and octafluorocyclobutane. Other equivalent methods can be used for determination. When the determination results... In case of any objection, the arbitration method specified in GB/T 28726 shall be adopted.

6.2.2 Pre-separation column

6.2.2.1 Pre-separation column I. A 3m long, 2mm inner diameter 316L stainless steel tube, filled with modified carbon with a particle size of 0.18mm~0.25mm. Molecular sieves, or other equivalent pre-separation columns, can be used.

6.2.2.2 Pre-separation column II. A stainless steel tube 0.6m long with an inner diameter of approximately 2mm, filled with silica gel with a particle size of approximately 0.18mm~0.25mm. Or other equivalent pre-separation columns.

6.2.3 Chromatographic column

6.2.3.1 Chromatographic column I. 1.5m long, 3mm inner diameter 316L stainless steel tube, packed with 5A fractions with a particle size of 0.18mm~0.25mm. A sieve, or other equivalent chromatographic column. This column is used to determine the content of oxygen, argon, nitrogen, carbon monoxide, and methane.

6.2.3.2 Chromatographic column II. a 2m long, 2mm inner diameter stainless steel tube packed with modified carbon molecular sieves with a particle size of 0.18mm~0.25mm. Or other equivalent chromatographic columns. This column is used to determine the content of carbon tetrafluoride.

6.2.3.3 Chromatographic column III. A 2m long, 2mm inner diameter stainless steel tube, packed with polymer material (ethylene) with a particle size of 0.18mm~0.25mm. A copolymer of styrene and divinylbenzene (or other equivalent chromatographic columns). This column is used to determine the content of carbon dioxide and hexafluoroethane.

6.2.3.4 Chromatographic column IV. a 4m long, 2mm inner diameter stainless steel tube, packed with polymer material (ethyl acetate) with a particle size of 0.18mm~0.25mm. A copolymer of styrene and divinylbenzene (or other equivalent chromatographic columns). This column is used to determine pentachlorofluoroethane, hexafluoropropylene, and heptafluoropropylene. Content of alkylene and octafluorocyclobutane.

6.2.4 Standard Samples The component content (mole fraction) in the standard sample should preferably be 1×10^-6 to 5×10^-6, and the balance gas should be high-purity helium, conforming to GB/T 4844. Regulation.

6.2.5 Referenced Gas Flow Diagram The reference gas path flow diagram is shown in Appendix A.

6.3 Determination of Moisture Content Perform the test according to GB/T 5832.1, GB/T 5832.2, or GB/T 5832.3.In case of any dispute regarding the test results, GB/T 5832.3 shall prevail. The prescribed method is arbitration.

6.4 Determination of Hydrogen Fluoride Content

6.4.1 Measurement Method The hydrogen fluoride content in octafluoropropane should be determined according to the method specified in GB/T 46384.1.Other equivalent methods may be used for determination, depending on the specific requirements. In case of disagreement regarding the determination result, the method specified in GB/T 46384.1 shall be the arbitration method.

6.4.2 Measurement conditions The reference measurement conditions are as follows:

---Characteristic peak wavenumber of hydrogen fluoride. 4107cm-1~4112cm-1.

---Resolution. 0.5cm-1.

---Ambient temperature. 18°C~25°C.

---Ambient relative humidity. <=60%.

---Other measurement conditions shall be performed in accordance with the instrument instruction manual.

6.4.3 Standard Samples For the determination, it is advisable to have three gaseous standard samples with different component contents, and the hydrogen fluoride content should be approximately 0.1 × 10^-6 (mole fraction). 1×10^-6 (mole fraction) or 5×10^-6 (mole fraction), the balance gas is high-purity helium, and should comply with the provisions of GB/T 4844.

6.5 Exhaust Gas Treatment During the measurement, exhaust gas treatment measures should be in place to prevent octafluoropropane from polluting the environment.

7.1 Sampling, Judgment and Retesting of Bottled Octafluoropropane

7.1.1 Bottled octafluoropropane products produced continuously and stably on the same production line constitute a batch.

7.1.2 The numerical values of the measurement results shall be rounded and the limit values shall be determined in accordance with the rounding comparison method specified in GB/T 8170.

7.1.3 The content of each component except hydrogen fluoride should be tested individually. If all test results meet the technical requirements, the product is deemed (qualified). If any indicator in the inspection results fails to meet the technical requirements, the product is deemed unqualified.

7.1.4 Hydrogen fluoride shall be randomly sampled and inspected according to the sampling quantity specified in Table

2.When the inspection results all meet the technical requirements, the batch of products shall be deemed (qualified/compliant). If any indicator in the inspection results fails to meet the technical requirements, the random sampling should be doubled from the same batch of products for re-inspection. If the inspection results fail to meet the technical requirements... If the test results meet the technical requirements, then the batch of products is considered (qualified) except for the non-compliant bottle; if the test results still do not meet the technical requirements, then... The batch of products was deemed substandard.

7.2 Sampling and Judgment of Octafluoropropane in Containerized and Tank Truck Packaging For octafluoropropane products packaged in containers or tank trucks, each product should be inspected and accepted individually. If all inspection results meet the technical requirements, the product is deemed acceptable. The product is considered (qualified). If any indicator in the inspection results fails to meet the technical requirements, the product is deemed (unqualified).

8.1 Marking

8.1.1 Octafluoropropane shall be accompanied by a product quality certificate upon leaving the factory, the contents of which shall at least include.

---Product name, manufacturer's name, hazardous chemical production license number;

---Production date or batch number, and shelf life;

---Fill weight (kg);

---This document number and the purity of octafluoropropane.

8.1.2 The packaging container should be marked with the words "Electronic Gas Octafluoropropane".

8.1.3 The packaging markings for octafluoropropane shall comply with the provisions of GB 190, the color markings shall comply with the provisions of GB/T 7144, and the label shall comply with... The provisions of GB 15258 and GB/T 16804.

8.2 Packaging, Transportation and Storage

8.2.1 The gas cylinders for packaging octafluoropropane shall comply with the provisions of GB/T 5099 (all parts) or GB/T 11640 or GB/T 33145.

8.2.2 The filling and storage of octafluoropropane shall comply with the provisions of GB/T 14193.1 and TSG

23.The safety management regulations for filling and storage are as follows: Regulations on the Safety Management of Hazardous Chemicals and Regulations on the Safety Supervision of Special Equipment.

8.2.3 The filling coefficient of octafluoropropane is

8.2.4 Gas cylinders with internal surface treatment should be used, and the treated cylinders should comply with the provisions of this document. The connection method of the cylinder valve outlet should preferably be... Use CGADISS716 or CGA660.

8.2.5 Leakage and contamination of the bottle opening should be prevented.

8.2.6 Octafluoropropane products should be stored in a cool, dry, and well-ventilated warehouse, and should not be exposed to direct sunlight or heat sources.

8.3 Security Information Safety information for octafluoropropane can be found in Appendix B.

......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 24 pages — is available in the English PDF.

Editions of GB/T 31986

EditionTitleRevisionStatus
GB/T 31986-2026Electronic gas - Octafluoropropanecurrent editionCurrent
GB/T 31986-2015Electronic gas - Octafluoropropaneprevious editionIn force until 1 November 2026

This page sells the current edition, GB/T 31986-2026. Earlier editions are listed for reference only.

How to Buy GB/T 31986-2026

  1. 1Add to cart. Click the "Buy GB/T 31986-2026" button on this page. You can add more standards before checkout.
  2. 2Checkout. Enter your email and billing details. Payment is processed securely by Stripe (cards, Apple Pay, Google Pay supported).
  3. 3Instant delivery (0–9 sec). Delivery is automatic: within seconds of payment you'll receive an email with a secure download link. The link stays valid for 72 hours.
  4. 4Invoice included. A tax invoice is attached to the confirmation email. Need a custom invoice? Contact us.

Related Standards

English PDF
24 pages
Instant delivery (0–9 sec)
Invoice included
View Cart

Secure payment via Stripe

Payments accepted

VisaMastercardAmerican ExpressApple PayGoogle PayStripe

GB/T 31986-2026

$260.00

$220.00for partners