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GB/T 6620-2009Test method for measuring warp on silicon slices by noncontact scanning (English PDF)

硅片翘曲度非接触式测试方法

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Issued by

Standardization Administration of China

Level / Type

National · Recommended

Issue date

October 30, 2009

Implementation date

June 1, 2010

Scope

GB/T 6620-2009 is the English-translated version of 硅片翘曲度非接触式测试方法.

GB/T 6620-2009 — This standard specifies the silicon single crystal cutting, grinding film, polished (hereinafter referred to as wafers) warpage non-contact testing methods.

This standard applies to measuring the diameter larger than 50mm, a thickness greater than the circular silicon 180µm. This standard also applies to measure other half Conductor wafer warpage.

The purpose of this test method is used for incoming inspection or process control. This test method is also applicable to the monitor plus member Thermo-chemical effect during processing of wafer warpage.

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Document preview — GB/T 6620-2009

National Standard of the People's Republic of China

ICS: 29.045
Classification: H 82
Replacing: GB/T 6620-1995

Issued by: Standardization Administration of China

What this standard covers1
Document data2
Standards quoted by this document3

What this standard covers

This standard specifies the monocrystalline silicon cutting discs, grinding pieces, polished (hereinafter referred to as silicon) warpage non-contact testing methods. This standard for measuring a diameter greater than 50 mm, a thickness greater than 180 µm circular wafers. This standard is also applicable to other semiconductor measuring warpage picture card. The purpose of this test method is used for incoming inspection or process control. This test method is also suitable for hot chemistry monitoring device wafers during processing of warpage.

Document data

International classification (ICS): 29.045.

Chinese classification (CCS): H82.

Estimated length of the Chinese original: 10,197 words.

Adopted international standard: SEMI MF657-0705, MOD.

Supersedes the earlier edition GB/T 6620-1995.

Standards quoted by this document

GB/T 2828.1; GB/T 6618; GB/T 14264

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 7 pages — is available in the English PDF.

Referenced standards

Normative references

ISO 2859

Cited by

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