GB/T 30652-2023Trichlorosilane for silicon epitaxial (English PDF)

Foreword

This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part 1: Structure and Drafting Rules of Standardization Documents" Drafting.

This document replaces GB/T 30652-2014 "Trichlorosilane for Silicon Epitaxy". Compared with GB/T 30652-2014, except for structural adjustments and In addition to editorial changes, the main technical changes are as follows.

a) Changed the scope of application (see Chapter 1, Chapter 1 of the 2014 edition);

b) Added a chapter on terms and definitions (see Chapter 3);

c) Changed some technical index requirements (see 4.1, 3.2 of the 2014 version);

d) Added test methods for some projects (see Chapter 5, Chapter 4 of the 2014 edition);

e) The regulations for group batching have been changed (see 6.2, 5.2 of the 2014 version);

f) Added inspection items (see 6.3);

g) Changed the requirements for sampling and sample preparation (see 6.4, 5.3 of the 2014 edition);

h) The judgment of inspection results has been changed (see 6.5, 2014 version 5.4);

i) Changed the requirements for marking (see 7.1, 6.1 of the 2014 version);

j) Changed the requirements for marking, packaging, transportation, storage, etc. (see Chapter 7, Chapter 6 of the 2014 edition).

1 Scope

This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation and storage of trichlorosilane (SiHCl3) for silicon epitaxy. Deposit, accompanying documents and order form contents.

This document applies to trichlorosilane for silicon epitaxy (hereinafter referred to as the product) produced by refining and purifying trichlorosilane as raw material.

2 Normative reference documents

The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, the dated quotations For undated referenced documents, only the version corresponding to that date applies to this document; for undated referenced documents, the latest version (including all amendments) applies to this document.

GB 190 Dangerous goods packaging markings

GB/T 191 Packaging, storage and transportation pictorial mark

GB/T 1551 Determination of resistivity of silicon single crystal.

GB/T 3723 General Safety Principles for Sampling Industrial Chemical Products

GB 12463 General technical conditions for transport and packaging of dangerous goods

GB/T 14264 Semiconductor Material Terminology

GB 15258 Regulations on Preparing Chemical Safety Labels

GB/T 16483 Chemical Safety Data Sheet Contents and Project Sequence

GB/T 24581 Determination of Group III and V impurity content in silicon single crystals by low-temperature Fourier transform infrared spectroscopy

GB/T 26571 Specification for storage period of special gases

GB/T 28654 Industrial trichlorosilane

GB/T 29056 Methods for chemical analysis of trichlorosilane for silicon epitaxy Quantities of boron, aluminum, phosphorus, vanadium, chromium, manganese, iron, cobalt, nickel, copper, molybdenum, arsenic and antimony Determination of inductively coupled plasma mass spectrometry

GB/T 29057 Procedure for evaluating polycrystalline silicon rods using zone melting crystal pulling method and spectral analysis method

GB 30000.19 Specification for Classification and Labeling of Chemicals Part 19: Skin Corrosion/Irritation

YS/T 987 Determination of carbon content in chlorosilane gas chromatography mass spectrometry

YS/T 1059 Gas chromatography method for determination of total carbon in trichlorosilane for silicon epitaxy

YS/T 1060 Determination of other chlorosilanes in trichlorosilane for silicon epitaxy by gas chromatography

3 Terms and definitions

The terms and definitions defined in GB/T 14264 apply to this document.

4 Technical requirements