GB/T 28654-2018Trichlorosilane for industrial use (English PDF)

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009.

This standard replaces GB/T 28654-2012 "Industrial trichlorosilane", compared with GB/T 28654-2012, except editorial modification The technical changes are as follows.

--- Revised the standards listed in the normative references (see Chapter 2, Chapter 2 of the 2012 edition);

--- Modified some of the requirements for trichlorosilane, dichlorodihydrosilane, silicon tetrachloride, increased the total amount of aluminum, phosphorus, (iron, chromium, copper, zinc), The total amount of (boron, gallium, indium) and the total carbon index, the boron index was removed (see 5.2, 5.2 of the 2012 edition);

--- Removed the warning content in the test method and merged with the warning content of the standard start (see 6.1 of 2012 edition);

--- Removed the general provisions of the test method (see 6.2 of the 2012 edition);

--- Removed inductively coupled plasma mass spectrometry (ICP-MS) for the determination of boron in industrial trichlorosilane (see.2012 edition) 6.4.2);

--- Increase the determination of aluminum, phosphorus, iron, chromium, copper, zinc, boron, gallium, indium (see 6.3);

--- Increase the total carbon (in C) measurement method (see 6.4);

--- Increased type inspection form (see 7.1);

--- Removed the description of the security (see Chapter 10 of the 2012 edition).

1 Scope

This standard specifies the classification, requirements, test methods, inspection rules and marking, labeling, packaging, transportation and storage of industrial trichlorosilane.

This standard applies to industrial trichlorosilane, which is mainly used as raw materials for polysilicon and silane coupling agents.

2 Normative references

The following documents are indispensable for the application of this document. For dated references, only dated versions apply to this document. For undated references, the latest edition (including all amendments) applies to this document.

GB 190 dangerous goods packaging mark

General rules for sampling GB/T 6678 chemical products

GB/T 6680 Liquid Chemical Product Sampling General

GB/T 8170 Numerical Rounding Rules and Representation and Determination of Limit Values

GB/T 9722 General Rules for Gas Chromatography of Chemical Reagents

GB/T 25915.1-2010 Clean rooms and related controlled environments - Part 1. Air cleanliness

JT618 Operation procedures for transportation, loading and unloading of dangerous goods

3 Molecular formula and relative molecular mass

Molecular formula. SiHCl3

Relative molecular mass. 135.44 (according to 2016 international relative atomic mass)

4 Classification

Industrial trichlorosilane is divided into two categories. I and II.

--- Class I. used to produce polysilicon;

--- Class II. used to produce silane coupling agents.

5 Requirements

5.1 Appearance. colorless transparent liquid.

5.2 Industrial trichlorosilane shall be tested in accordance with the test methods specified in this standard in accordance with Table 1. […]