YS/T 1059-2015Determination of total carbon content in trichlorosilane for silicon eqitaxy - Gas chromatographic method (English PDF)
硅外延用三氯氢硅中总碳的测定 气相色谱法
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Issued by
Ministry of Industry and Information Technology
Level / Type
National · Recommended
Issue date
April 30, 2015
Implementation date
October 1, 2015
Scope
YS/T 1059-2015 is the English-translated version of 硅外延用三氯氢硅中总碳的测定 气相色谱法.
YS/T 1059-2015 — This standard specifies the gas chromatographic method using trichlorosilane silicon epitaxial total carbon content. This standard applies to the epitaxial silicon with trichlorosilane Determination of total carbon content was measured in the range of 0.00005% to 0.005%.
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Document preview — YS/T 1059-2015
National Standard of the People's Republic of China
- ICS
- 77.040.30
- Classification
- H 17
Issued by: Ministry of Industry and Information Technology
Contents
- What this standard covers1
- Document data2
What this standard covers
This Standard specifies the gas chromatographic method using trichlorosilane silicon epitaxial total carbon content. This Standard applies to the epitaxial silicon with trichlorosilane in the determination of total carbon content of 05% was measured in the range of 0.000% to 0.005%.
Document data
International classification (ICS): 77.040.30.
Chinese classification (CCS): H17.
Estimated length of the Chinese original: 7,739 words.
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 5 pages — is available in the English PDF.
Referenced standards
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