YS/T 837-2012Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies (English PDF)
溅射靶材-背板结合质量超声波检验方法
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Issued by
Ministry of Industry and Information Technology
Level / Type
National · Recommended
Issue date
November 7, 2012
Implementation date
March 1, 2013
Scope
YS/T 837-2012 is the English-translated version of 溅射靶材-背板结合质量超声波检验方法.
YS/T 837-2012 — This standard specifies the sputtering target material - back binding quality test methods - General requirements, test equipment, test block, the inspection process, the lack of Depression evaluation and inspection reports, the method using ultrasonic pulse longitudinal wave reflective liquid immersion method, the C-scan test technology.
This standard applies to the intermediate layer material in conjunction with the way (such as soldering, brazing and epoxy adhesive, etc.) sputtering target - binding back Testing side holes, unbound, oxide inclusions and other defects. Other uses of quality material combined NDE can also refer to the use.
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Document preview — YS/T 837-2012
National Standard of the People's Republic of China
- ICS
- 77.120.99
- Classification
- H 68
Issued by: Ministry of Industry and Information Technology
Contents
- What this standard covers1
- Document data2
- Standards quoted by this document3
What this standard covers
This standard specifies the sputtering target backplane combining quality test methods General requirements, test equipment, test block, the inspection process, defect assessment and inspection reports, etc. The method uses ultrasonic longitudinal wave pu
Document data
International classification (ICS): 77.120.99.
Chinese classification (CCS): H68.
Estimated length of the Chinese original: 10,124 words.
Standards quoted by this document
GB 5226.1; GB/T 9445; GB/T 11259; GB/T 12604.1; GB/T 17421.1; GB/T 17421.2; GB/T 18400.6; GB/T 18694; GB/T 18852; GJB 1580A; GJB 9712A; JB/T 8771.4; JB/T 9269
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 7 pages — is available in the English PDF.
Referenced standards
Normative references
- GB/T 9445Non-destructive testing - Qualification and certification of personnels
- GB/T 11259Non-destructive testing - Practice for fabrication and control of steel reference blocks used in ultrasonic testing
- GB/T 12604.1Non-destructive testing - Terminology - Ultrasonic testing
- GB/T 17421.1Test code for machine tools - Part 1: Geometric accuracy of machines operating under no-load or quasi-static conditions
- GB/T 17421.2Test code for machine tools - Part 2: Determination of accuracy and repeatability of positioning of numerically controlled axes
- GB/T 18400.6Test conditions for machining centres - Part 6: Accuracy of speeds and interpolations
GB 5226.1
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Related Standards
GB/T 11259-2015 — Non-destructive testing - Practice for fabrication and control of steel reference blocks used in ultrasonic testing
GB/T 12604.1-2020 — Non-destructive testing - Terminology - Ultrasonic testing
GB/T 12604.10-2023 — Non-destructive testing - Terminology - Part 10: Magnetic memory testing
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