GB/T 29658-2013High-Purity sputtering aluminium and aluminium alloy target used in electronic film (English PDF)

4.4 Welding quality

4.4.2 The method for helium leak test of electron beam welding is as specified in GB/T 15823; and water leak test is as specified in JB/T 4734.

4.4.1 Brazing and diffusion welding are as specified in YS/T 837

4.5 Dimensional inspection method

The dimensions of products and their tolerances shall be measured with measuring tools of corresponding accuracies.

4.6 Appearance quality inspection method

The appearance quality of aluminium target is evaluated by visual inspection; in case of any abnormality, use a magnifying glass or digital microscope for identification.

5.1 Inspection and acceptance

5.1.1 Aluminium target shall be tested by the supplier to ensure the product quality is as specified in this Standard or the order (or contract); and the quality certificate shall be filled out.

5.1.2 The purchaser shall conduct retest for the aluminium target received in accordance with this Standard. If the retest results are inconsistent with this Standard (or the purchase contract), the purchase shall notify the supplier within 3 months after receiving the product and it shall be solved as agreed on by the supplier and the purchaser. If arbitration is required, the samples for arbitration shall be taken in the presence of both sides.

5.2 Batching

The products shall be submitted for acceptance by batch. Each batch consists of the products of the same production batch, the same composition and specifications.

5.3 Test items, sampling locations and sampling quantity

5.3.1 Aluminium target shall be tested in an all-round way before delivery. The test items, sampling locations and sampling quantity shall be as specified in Table 5.

6.2 Packaging

6.2.1 The cleaning, drying and inner packing of aluminium target shall be conducted in a clean room. Target materials shall be washed thoroughly; each piece shall be packaged separately after vacuum drying; the seal of vacuum bags shall be smooth without being penetrated; the vacuum bags shall have no leak or vacuum leakage.

6.2.2 The outer packing shall be of paper box or hollow box packing. The packing boxes shall be provided with anti-collision measures. The quality certificate shall be packed with a plastic packaging bag before being affixed to a packing box.

6.2.3 The packaging products shall be stored in the clean environment.

6.3 Transportation and storage

During the process of transportation and storage, attention shall be paid to prevention of vibration, moisture, crushing and secondary pollution.

6.4 Quality certification

Each batch of products shall be accompanied with a quality certificate, indicating.

a) name, address, telephone and fax of the supplier;

b) product name; […]