GB/T 20510-2024Indium tin oxide targets (English PDF)

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1: Structure and drafting rules for standardization documents" Drafting is required.

This document replaces GB/T 20510-2017 "Indium Tin Oxide Target". Compared with GB/T 20510-2017, in addition to structural adjustments and In addition to logical changes, the main technical changes are as follows.

The scope of application was changed from "applicable to indium tin oxide targets produced with 99.99% metallic indium and tin as raw materials" to "applicable to Indium tin oxide target is produced by mixing In2O3 and SnO2 powder in a certain proportion and sintering by atmospheric pressure process (see Chapter 1, Chapter 1 of the 2017 edition);

The definition of "relative density" has been changed (see 3.2, 3.2 of the 2017 edition);

The term and definition of "Kelvin bridge" have been deleted (see 3.3 of the 2017 edition);

The content of relative density has been changed (see 3.2, 3.2 of the 2017 edition);

The classification method has been changed from classification based on relative density to classification based on shape and the ratio of indium oxide and tin oxide (see Chapter 4, 4.1 of the 2017 edition);

The requirements for main chemical composition have been changed (see 5.1.1, 4.2.1 of the 2017 edition);

The requirements for physical properties have been changed (see 5.2, 4.3 of the 2017 edition);

The content of dimension specifications and their allowable deviations has been changed (see 5.3, 4.4 of the 2017 edition);

The requirements for appearance quality have been changed (see 5.4, 4.5 of the 2017 edition);

Added internal quality requirements (see 5.5);

The chemical composition analysis method has been changed (see 6.1, 5.1 of the 2017 edition);

The test methods for relative density and resistivity have been changed (see 6.2.1 and 6.2.2, 5.2.1 and 5.2.2 of the 2017 edition);

The content of the inspection items has been changed (see 7.3, 6.3 of the 2017 edition).

1 Scope

This document specifies the classification, technical requirements, test methods, inspection rules and standards of indium tin oxide targets (hereinafter referred to as ITO targets), labels, packaging, transportation and storage, accompanying documents and order contents.

This document is applicable to indium tin oxide targets produced by mixing In2O3 and SnO2 powders in a certain proportion and sintering them under normal pressure, as the core material of transparent conductive film.

2 Normative references

The contents of the following documents constitute the essential clauses of this document through normative references in this document.

For referenced documents without a date, only the version corresponding to that date applies to this document; for referenced documents without a date, the latest version (including all amendments) applies in this document.

GB/T 1551 Determination of resistivity of silicon single crystals - In-line four-probe method and direct current two-probe method

GB/T 3850 Density determination method for dense sintered metal materials and cemented carbides

GB/T 6569 Test method for flexural strength of fine ceramics

GB/T 8170 Rules for rounding off values and expression and determination of limit values

GB/T 13298 Metal microstructure inspection methods

GB/T 16535 Test method for linear thermal expansion coefficient of fine ceramics - Ejector method

GB/T 38389 Chemical analysis method of indium tin oxide target

SL 499 Standard Test Method for Residual Stress Measurement by Hole Drilling Strain Method

YS/T 837 Ultrasonic testing method for sputtering target-backing plate bonding quality

3 Terms and definitions

The following terms and definitions apply to this document.