GB/T 23611-2023Gold and gold alloy targets (English PDF)

Foreword

This document complies with the regulations of GB/T 1.1-2020 "Standardization Work Guidelines Part 1: Structure and Drafting Rules of Standardization Documents" Custom drafting.

This document replaces GB/T 23611-2009 "Gold Target". Compared with GB/T 23611-2009, except for structural adjustments and editorial changes In addition, the main technical changes are as follows:

a) Added a "Terms and Definitions" chapter (see Chapter 3);

b) Added AuGe and AuGeNi alloy target varieties (see 4.1.2);

c) Added structural form and supply status (see 4.1.4, 4.1.5);

d) Added technical requirements and test methods for AuGe and AuGeNi alloy targets (see 5.1 and 6.1);

e) Added the chemical composition list of gold targets (see 5.1);

f) Added target welding quality requirements (see 5.5);

g) The outer dimensions and allowable deviations of the gold target have been changed (see 5.6, 3.4 of the 2009 edition);

h) Added rectangular target dimensions and allowable deviation requirements (see 5.6).

1 Scope

This document stipulates the product classification, technical requirements, test methods, inspection rules and marking, packaging, transportation and storage of gold and gold alloy targets, and accompanying documents and order form contents.

This document applies to gold and gold alloy targets for semiconductor electronic devices (hereinafter referred to as "targets").

2 Normative reference documents

The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, dated quotations For undated referenced documents, only the version corresponding to that date applies to this document; for undated referenced documents, the latest version (including all amendments) applies to this document.

GB/T 6394 Method for determination of average grain size of metals

GB/T 8651 Ultrasonic plate wave flaw detection method for metal sheets

GB/T 11066.1 Methods for chemical analysis of gold - Determination of gold content Fire assay

GB/T 11066.10 Methods for chemical analysis of gold - Determination of silicon content Molybdenum blue spectrophotometry

GB/T 11066.11 Methods for chemical analysis of gold - Part 11: Magnesium, chromium, manganese, iron, nickel, copper, palladium, silver, tin, antimony, lead and bismuth content Determination by inductively coupled plasma mass spectrometry

GB/T 15077 Methods for measuring geometric dimensions of precious metals and their alloy materials

GB/T 25934 (all parts) Chemical analysis methods for high purity gold

YS/T 837 Ultrasonic inspection method for sputtering target-back plate bonding quality

3 Terms and definitions

The following terms and definitions apply to this document.