GB/T 42720-2023Electronic specialty gas—Hexachlorodisilane (English PDF)

1 Scope

This document specifies the technical requirements, sampling, test methods, inspection rules, marking, packaging, transportation, storage and safety information of hexachlorodisilane.

interest requirements.

This document applies to hexachlorodisilane for electronic applications prepared by purifying hexachlorodisilane, a by-product of polycrystalline silicon production.

2 Normative reference documents

The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, the dated quotations

For undated referenced documents, only the version corresponding to that date applies to this document; for undated referenced documents, the latest version (including all amendments) applies to this document.

GB 190 Dangerous goods packaging markings

GB/T 601 Preparation of chemical reagent standard titration solution

GB/T 602 Preparation of standard solutions for determination of impurities in chemical reagents

GB/T 3634.2 Hydrogen Part 2.Pure hydrogen, high-purity hydrogen and ultra-pure hydrogen

GB/T 3723 General Safety Principles for Sampling Industrial Chemical Products

GB/T 4844 Pure helium, high-purity helium and ultra-pure helium

GB/T 6680 General rules for sampling of liquid chemical products

GB/T 8979 Pure nitrogen, high-purity nitrogen and ultra-pure nitrogen

GB/T 9722 General rules for gas chromatography with chemical reagents

GB/T 11446.1 Electronic grade water

GB 15258 Regulations on Preparing Chemical Safety Labels

GB/T 25915.1 Clean rooms and related controlled environments Part 1.Classification of air cleanliness levels according to particle concentration

GB 30000.19 Specifications for Classification and Labeling of Chemicals Part 19.Skin Corrosion/Irritation

GB/T 34972 Determination of metal content in gases used in the electronics industry by inductively coupled plasma mass spectrometry

GB/T 38867 Silicon tetrachloride for electronic industry

JJF1159 Calibration Specification for Quadrupole Inductively Coupled Plasma Mass Spectrometer

JT/T 617.4 Rules for Road Transport of Dangerous Goods Part 4.Requirements for Transport Packaging

3 Terms and definitions

There are no terms or definitions to be defined in this document.

4 Technical requirements

Should comply with the requirements of Table 1.