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GB/T 38867-2020Silicon tetrachloride for electronic industry (English PDF)

电子工业用四氯化硅

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Issued by

SAMR; SAC

Level / Type

National · Recommended

Issue date

July 21, 2020

Implementation date

February 1, 2021

Scope

GB/T 38867-2020 is the English-translated version of 电子工业用四氯化硅.

GB/T 38867-2020 sets the technical requirements, inspection rules, test methods, marking, packaging, transport, storage and safety requirements for silicon tetrachloride used in the electronics industry.

Clause 1 applies it to silicon tetrachloride intended for the electronics industry and obtained after industrial silicon tetrachloride has been refined and purified.

Its contents run from the scope and the normative references to clause 3, Technical requirements, which makes the product conform to Table 1 and adds a relative transmittance requirement in Table 2 for silicon tetrachloride used for optical fibre.

The normative references cover how the product is contained and checked: GB 190 on dangerous goods packaging marks, GB/T 5099 on seamless steel gas cylinders, GB/T 32566 on welded stainless steel gas cylinders, GB/T 7144 on cylinder colour marking, GB/T 16804 on cylinder warning labels, GB/T 11446.1-2013 on electronic grade water, GB/T 28726 on helium ionization gas chromatography and GB/T 34972 on the determination of metals in gases for the electronics industry by inductively coupled plasma mass spectrometry, together with the TSG R0006 gas cylinder safety regulation and the Chinese regulations on the safety management of hazardous chemicals and on special equipment safety supervision.

The standard was proposed and is administered by the National Technical Committee on Semiconductor Equipment and Materials Standardization (SAC/TC203), with drafting by Hubei Jingxing Technology, the Hubei Institute of Standardization and Quality, Luoyang China Silicon High-Tech, Tangshan Sanfu Electronic Materials, Guangdong Huate Gas and other gas and testing organisations.

It carries the Chinese classification G86 and ICS 71.100.20, and runs to roughly 14,184 words. It was issued on 2020-07-21 and has applied since 2021-02-01.

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Document preview — GB/T 38867-2020

National Standard of the People's Republic of China

ICS: 71.100.20
Classification: G 86

Issued by: State Administration for Market Regulation; Standardization Administration of the PRC

Foreword
1 Scope
2 Normative references
3 Technical requirements

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009.

1 Scope

This standard specifies the technical requirements, inspection rules, test methods, signs, packaging, transportation, storage and safety of silicon tetrachloride used in the electronics industry. Requirements.

This standard applies to silicon tetrachloride used in the electronics industry after the industrial silicon tetrachloride is refined and purified.

2 Normative references

The following documents are indispensable for the application of this document. For dated reference documents, only the dated version applies to this document. For undated references, the latest version (including all amendments) applies to this document.

GB 190 Dangerous Goods Packaging Mark

GB/T 602 Preparation of standard solutions for impurity determination in chemical reagents

GB/T 3723 General Rules for Sampling Safety of Industrial Chemical Products

GB/T 4842 Argon

GB/T 5099 steel seamless gas cylinder

GB/T 6040 General Rules of Infrared Spectroscopy Analysis Method

GB/T 6680 General Rules for Sampling of Liquid Chemical Products

GB/T 7144 Gas cylinder color mark

GB/T 11446.1-2013 electronic grade water

GB 15258 Regulations for the preparation of chemical safety labels

GB/T 16804 Gas cylinder warning label

GB/T 28726 Gas analysis Helium ionization gas chromatography

GB/T 32566 Stainless steel welded gas cylinder

GB/T 34972 Determination of metal content in gases for electronics industry inductively coupled plasma mass spectrometry

TSGR0006 Gas Cylinder Safety Technical Supervision Regulation

Regulations on the Safety Management of Hazardous Chemicals (promulgated by Order No. 344 of the State Council of the People's Republic of China on January 26, 2002; revised and adopted at the 144th executive meeting of the State Council on February 16, 2011)

Regulations on Safety Supervision of Special Equipment (2009 Edition, Order No. 549 of the State Council of the People's Republic of China)

3 Technical requirements

The technical requirements of silicon tetrachloride should meet the requirements of Table 1. The relative transmittance requirements of silicon tetrachloride for optical fiber should also be increased. The requirements should meet the requirements of Table 2.

......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.

Referenced standards

Normative references

GB/T 5099

Cited by

GB/T 42720-2023Electronic specialty gas—Hexachlorodisilane

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