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GB/T 46611-2025Lithium niobate single-crystal thin film for electro-optic modulators (English PDF)

电光调制器用铌酸锂单晶薄膜

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Issued by

SAMR; SAC

Level / Type

National · Recommended

Issue date

October 31, 2025

Implementation date

May 1, 2026

Scope

GB/T 46611-2025 is the English-translated version of 电光调制器用铌酸锂单晶薄膜.

GB/T 46611-2025 is the Chinese standard "Lithium niobate single-crystal thin film for electro-optic modulators". Its scope clause reads: This document specifies the requirements, inspection and testing rules, packaging, labeling/marking, storage and transportation of lithium niobate single-crystal thin films for electro-optic modulators.

The requirements for output are described, along with the detection method. This document applies to lithium niobate thin films with thicknesses ranging from 100 nm to 1000 nm and diameters of 76.2 mm, 100.0 mm, 150.0 mm, and...

For.200.0 mm, X-tangential electro-optic modulators, use lithium niobate single-crystal thin films of the same composition; for other specifications of lithium niobate single-crystal thin films, refer to the same specifications. Its clauses include terms and definitions.

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Document preview — GB/T 46611-2025

National Standard of the People's Republic of China

ICS: 31.030
Classification: Q 65

Issued by: State Administration for Market Regulation; Standardization Administration of the PRC

Preface
1.Scope
2 Normative References
3.Terms and Definitions
4 Requirements
4.1 Appearance Quality
4.2 Tolerance for Crystal Orientation on Thin Film Surface
4.3 Bonding deflection angle tolerance
4.4 Bond strength
4.5 Optical uniformity
4.6 Linear electro-optic coefficient
4.7 Degree of single-domain specialization
4.8 Substrate resistivity
5.Detection methods 6.
5.1 Testing Environment
5.2 Total Thickness
5.3 Total Thickness Variation
5.4 Local thickness variation and local thickness variation rate
5.5 Edge area width
5.6 Surface appearance quality
5.7 17-point average thickness tolerance and 17-point thickness variation
5.8 Curvature
5.9 Positive surface roughness
5.10 Tolerance for Crystal Orientation on Thin Film Surface
5.11 Bonding deflection angle tolerance
5.12 Bond strength
5.13 Optical uniformity
5.14 Linear electro-optic coefficient
5.15 Single-domain degree
5.16 Substrate resistivity
6.Inspection and Acceptance Rules 7.
6.1 Inspection and Acceptance
6.2 Inspection Classification
6.3 Inspection Items
6.4 Batch Inspection
6.5 Periodic Inspection
7 Packaging, Labeling/Marking, Storage and Transportation
7.1 Packaging
7.2 Labels/Marks
7.3 Store
7.4 Transportation
Appendix A (Normative) Method for measuring bond deflection angle
Appendix B (Normative) Measurement Methods for Optical Uniformity
Appendix C (Normative) Measurement Method of Linear Electro-optic Coefficient
Appendix D (Normative) Methods for Measuring the Degree of Single-Domain Classification

1 Scope

This document specifies the requirements, inspection and testing rules, packaging, labeling/marking, storage and transportation of lithium niobate single-crystal thin films for electro-optic modulators.

The requirements for output are described, along with the detection method.

This document applies to lithium niobate thin films with thicknesses ranging from 100 nm to 1000 nm and diameters of 76.2 mm, 100.0 mm, 150.0 mm, and...

2 Normative references

The contents of the following documents, through normative references within the text, constitute essential provisions of this document. Dated citations are not included.

For references to documents, only the version corresponding to that date applies to this document; for undated references, the latest version (including all amendments) applies.

This document.

GB/T 191-2008 Pictorial Symbols for Packaging and Storage

GB/T 1185 Surface defects of optical components

GB/T 1551 Determination of resistivity of single crystal silicon. Four-probe method and two-probe method

GB/T 2828.1-2012 Sampling Procedures for Inspection by Attributes - Part 1.Lot-by-lot Inspection Sampling Indexed by Acceptable Quality Limit (AQL) plan

GB/T 6618 Test method for thickness and total thickness variation of silicon wafers

GB/T 6619 Test method for bending of silicon wafers

GB/T 14264 Semiconductor Materials Terminology

GB/T 20919 Electronic Digital Micrometer

GB/T 25915.1-2021 Cleanrooms and related controlled environments - Part 1.Classification of air cleanliness levels by particle concentration

GB/T 29505 Method for measuring surface roughness of flat surfaces of silicon wafers

GB/T 30118 Specifications and Measurement Methods for Single Crystal Wafers Used in Surface Acoustic Wave (SAW) Devices

GB/T 30857 Test Method for Thickness and Thickness Variation of Sapphire Substrates

GB/T 40279 Optical reflection method for testing the thickness of thin films on silicon wafers

GB/T 41853 Measurement of inter-wafer bonding strength for semiconductor devices and microelectromechanical devices

3 Terms and Definitions

The terms and definitions defined in GB/T 14264, GB/T 6619 and GB/T 30118, as well as the following terms and definitions, apply to this document.

3.1

A single-crystal lithium niobate compound thin film with a thickness of 100 nm to 1000 nm and the chemical formula LiNbO3 was prepared on a specific substrate.

Note. TFLN typically consists of a lithium niobate single-crystal thin film layer, an insulating layer, a trapping layer, and a substrate stacked sequentially. The trapping layer can be omitted depending on the requirements.

Its structure is shown in Figure 1.

GB/T 9775 | JC/T 2625 | GB/T 15344 | GB/T 16863 | GB/T 46609 | […]

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 21 pages — is available in the English PDF.

Referenced standards

Normative references

Editions of GB/T 46611

Edition	Title	Revision	Status
GB/T 46611-2025	Lithium niobate single-crystal thin film for electro-optic modulator	current edition	Current

This page sells the current edition, GB/T 46611-2025. Earlier editions are listed for reference only.

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