GB/T 46611-2025Lithium niobate single-crystal thin film for electro-optic modulators (English PDF)

Foreword

This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part

1.Structure and Drafting Rules of Standardization Documents". Drafting. Please note that some content in this document may involve patents. The issuing organization of this document assumes no responsibility for identifying patents. This document was proposed by the China Building Materials Federation. This document is under the jurisdiction of the National Technical Committee on Standardization of Artificial Lenses (SAC/TC461). This document was drafted by: Jinan Jingzheng Electronics Technology Co., Ltd., Shanghai Xinsilicon Polymer Semiconductor Co., Ltd., and the Semiconductor Research Institute of the Chinese Academy of Sciences. Research institutes, Huazhong University of Science and Technology, Wuhan Anpai Core Technology Co., Ltd., Xinjiang Institute of Physics and Chemistry, Chinese Academy of Sciences, Zhuhai Optoelectronics Technology Co., Ltd. Co., Ltd., Guangzhou Niobium Optoelectronics Co., Ltd., University of Electronic Science and Technology of China, Hisilicon Optoelectronics Co., Ltd., Wuhan Optics Valley Information Optoelectronics Innovation Center Center Co., Ltd., Institute of Microelectronics, Chinese Academy of Sciences, Jiangxi Yunjing Optoelectronic Technology Co., Ltd., Lanzhou University, Shandong University, Nankai University, Nantong Nanlitai Technology Co., Ltd., Shanghai Jiao Tong University, Jinan Quantum Technology Research Institute, and the 26th Research Institute of China Electronics Technology Group Corporation Institute, Nanjing Nanzhi Advanced Optoelectronic Integration Technology Research Institute Co., Ltd., Zhejiang University, Ningbo Yuanxin Electronics Technology Co., Ltd., Beijing Shiweitongke Technology Co., Ltd., Tianjin Huahui Core Technology Group Co., Ltd., Beijing Bose Quantum Technology Co., Ltd., Shanghai Turing Intelligent Computing Quantum Technology Co., Ltd. Limited Liability Company, Wuxi Photonic Chip Joint Research Center, Suzhou Elan Micro Semiconductor Technology Co., Ltd., Suzhou Accelink Technologies Co., Ltd., China The 55th Research Institute of China Electronics Technology Group Corporation, the 44th Research Institute of China Electronics Technology Group Corporation, and Tianjin Jinhang Technical Physics Research Institute Institute, Hefei Xinzhihua Photonics Technology Co., Ltd., Beijing Institute of Technology, Jiangsu Huaxing Laser Technology Co., Ltd. The main drafters of this document are. Hu Wen, Liang Longyue, Ou Xin, Chen Yang, Li Ming, Wang Wenting, Sun Junqiang, Xia Jinsong, Sun Jun, Ji Guijun, and Cai Xinlun. Chen Kaixin, Chen Xin, Xiao Xi, Huang Kai, Li Zhihua, Xia Zongren, Tian Yonghui, Tang Gongbin, Bo Fang, Liu Dan, He Yu, Wang Dongzhou, Zheng Mingyang, Ding Yuchong Chen Zheming, Feng Jie, Yan Zhong, Liu Liu, Dai Xiangyang, Li Junhui, Wang Xuyang, Chen Shuai, Qiao Shijun, Zhan Yongxing, Fang Xiaotian, Wei Hai, Yin Xiang, Ji Mengxi Qian Guang, Liu Penghao, Zhang Hongbo, Sun Wenbao, Hua Pingyang, Xu Pengfei. Lithium niobate single-crystal thin films for electro-optic modulators

1 Scope

GB/T 46611-2025 is the Chinese national standard covering thin-film lithium niobate on insulator - the film thickness and its uniformity across the wafer, the crystal orientation and the domain structure, the optical loss, and the surface quality, on the material that is replacing bulk lithium niobate in high-speed optical modulators. First edition, in force from 1 May 2026. Issued on 31 October 2025, it has been in force since 1 May 2026.

This document specifies the requirements, inspection and testing rules, packaging, labeling/marking, storage and transportation of lithium niobate single-crystal thin films for electro-optic modulators. The requirements for output are described, along with the detection method. This document applies to lithium niobate thin films with thicknesses ranging from 100 nm to 1000 nm and diameters of

76.2 mm, 100.0 mm, 150.0 mm, and... For.200.0 mm, X-tangential electro-optic modulators, use lithium niobate single-crystal thin films of the same composition; for other specifications of lithium niobate single-crystal thin films, refer to the same specifications.

2 Normative references

The contents of the following documents, through normative references within the text, constitute essential provisions of this document. Dated citations are not included. For references to documents, only the version corresponding to that date applies to this document; for undated references, the latest version (including all amendments) applies. This document.

GB/T 191-2008 Pictorial Symbols for Packaging and Storage

GB/T 1185 Surface defects of optical components

GB/T 1551 Determination of resistivity of single crystal silicon. Four-probe method and two-probe method

GB/T 2828.1-2012 Sampling Procedures for Inspection by Attributes - Part

3 Terms and Definitions

The terms and definitions defined in GB/T 14264, GB/T 6619 and GB/T 30118, as well as the following terms and definitions, apply to this document.

3.1 A single-crystal lithium niobate compound thin film with a thickness of 100 nm to 1000 nm and the chemical formula LiNbO3 was prepared on a specific substrate.

Note. TFLN typically consists of a lithium niobate single-crystal thin film layer, an insulating layer, a trapping layer, and a substrate stacked sequentially. The trapping layer can be omitted depending on the requirements. Its structure is shown in Figure 1.