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GB/T 42721-2023Electronic specialty gas—Nitric oxide (English PDF)

电子特气一氧化氮

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Issued by

SAMR; SAC

Level / Type

National · Recommended

Issue date

August 6, 2023

Implementation date

March 1, 2024

Scope

GB/T 42721-2023 is the English-translated version of 电子特气一氧化氮.

This document specifies the technical requirements for nitric oxide as an electronic specialty gas, together with sampling, the test methods, the inspection rules, the marking, packaging, transport and storage, and the safety information required.

The document applies to electronic grade nitric oxide used in the manufacture of integrated circuits and in the other electronics industries.

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Document preview — GB/T 42721-2023

National Standard of the People's Republic of China

ICS: 71.100.20
Classification: G 86

Issued by: State Administration for Market Regulation; Standardization Administration of the PRC

Foreword
1 Scope
2 Normative reference documents
3 Terms and definitions
4 Technical requirements

Foreword

This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part 1: Structure and Drafting Rules of Standardization Documents" Drafting.

1 Scope

This document specifies the technical requirements, sampling, test methods, inspection rules, marking, packaging, transportation, storage and safety information of nitric oxide requirements.

This document applies to electronic nitric oxide used in the manufacturing of integrated circuits and other electronic industries.

2 Normative reference documents

The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, the dated quotations For undated referenced documents, only the version corresponding to that date applies to this document; for undated referenced documents, the latest version (including all amendments) applies to this document.

GB 190 Dangerous goods packaging markings

GB/T 5099 (all parts) Steel seamless gas cylinders

GB/T 5832.3 Determination of trace moisture in gases Part 3: Cavity ring-down spectroscopy

GB/T 7144 Gas cylinder color marking

GB/T 8979 Pure nitrogen, high-purity nitrogen and ultra-pure nitrogen

GB/T 11640 Aluminum alloy seamless gas cylinder

GB/T 14194 Compressed gas cylinder filling regulations

GB 15258 Regulations on Preparing Chemical Safety Labels

GB/T 16804 Gas cylinder warning label

GB/T 28726 Gas analysis helium ionization gas chromatography

TSGR0005 Safety Technical Supervision Regulations for Mobile Pressure Vessels

TSG23 Gas Cylinder Safety Technical Regulations

ISO 19230 Gasanalysis-Samplingguidelines

3 Terms and definitions

There are no terms or definitions to be defined in this document.

4 Technical requirements

The technical requirements for nitric oxide should comply with the provisions of Table 1.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.

Referenced standards

Normative references

GB/T 5099 · ISO 19230

Similar standards

GB/T 31058-2026|GB/T 31986-2026|GB/T 31987-2026|GB/T 32386-2026|GB/T 35995-2026|GB/T 47882-2026

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