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GB/T 41326-2022Hexafluorobutadiene (English PDF)

六氟丁二烯

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Issued by

SAMR; SAC

Level / Type

National · Recommended

Issue date

March 9, 2022

Implementation date

October 1, 2022

Scope

GB/T 41326-2022 is the English-translated version of 六氟丁二烯.

GB/T 41326-2022 is the Chinese national standard for hexafluorobutadiene, the etching gas of advanced semiconductor processes.

It gives the technical requirements - the purity and the limits on the impurities that matter in a process chamber - the test methods, the inspection rules and the requirements on marking, packaging, transport and storage, and it sets out the safety information of the product.

It applies to hexafluorobutadiene made from tetrafluoroethylene or from chlorotrifluoroethylene. Gas producers and the fabs that buy the gas use it. Issued on 9 March 2022, it has applied since 1 October 2022.

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Document preview — GB/T 41326-2022

National Standard of the People's Republic of China

ICS: 71.100.20
Classification: G 86

Issued by: State Administration for Market Regulation; Standardization Administration of the PRC

Foreword
1 Scope
2 Normative references

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1: Structure and Drafting Rules of Standardization Documents" drafted.

1 Scope

This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation and storage requirements for hexafluorobutadiene. Safety information for hexafluorobutadiene is described. This document applies to hexafluorobutadiene prepared from tetrafluoroethylene or chlorotrifluoroethylene.

2 Normative references

The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, dated citations documents, only the version corresponding to that date applies to this document; for undated references, the latest edition (including all amendments) applies to this document.

GB 190 Dangerous Goods Packaging Marks Preparation of GB/T 601 Standard Titration Solutions for Chemical Reagents Preparation of preparations and products used in GB/T 603 chemical reagent test methods

GB/T 3634.2 Hydrogen Part 2: Pure Hydrogen, High-Purity Hydrogen and Ultra-Pure Hydrogen

GB/T 3723 General Rules for Sampling Safety of Chemical Products for Industrial Use

GB/T 4844 Pure helium, high-purity helium and ultra-pure helium

GB/T 5099 (all parts) seamless steel gas cylinders

GB/T 5100 Steel Welded Gas Cylinders

GB/T 6681 General rules for sampling of gaseous chemical products

GB/T 6682 Analysis Laboratory Water Specifications and Test Methods

GB/T 7144 Color Marking of Gas Cylinders

GB/T 8170 Numerical Rounding Rules and Representation and Judgment of Limit Values

GB/T 8979 Pure nitrogen, high-purity nitrogen and ultra-pure nitrogen

GB/T 9722 General Rules for Gas Chromatography of Chemical Reagents

GB/T 10248 Preparation of mixed gas for calibration of gas analysis by static volume method

GB/T 14193 Liquefied Gas Cylinder Filling Regulations

GB 15258 Regulations for the preparation of chemical safety labels

GB/T 16804 Gas Cylinder Warning Label

GB/T 33063 General method for determination of fluoroolefin non-condensable gas (NCG) for refrigerants

GB/T 33064 General method for determination of fluoroalkene chloride (Cl-) for refrigerants

GB/T 33065 General Method for Determination of Acidity of Fluoroalkenes Used in Refrigerants

GB/T 33066 General Method for Determination of Fluoroolefin Evaporation Residues for Refrigerants

GB/T 34237 General Method for Determination of Moisture of Fluoroolefins Used in Refrigerants TSGR0005 Mobile Pressure Vessel Safety Technical Supervision Regulations TSG23 gas cylinder safety technical regulations

......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 21 pages — is available in the English PDF.

Referenced standards

Normative references

GB/T 5099 · GB/T 14193

Similar standards

GB/T 31058-2026|GB/T 31986-2026|GB/T 31987-2026|GB/T 32386-2026|GB/T 35995-2026|GB/T 47882-2026

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