GB/T 36969-2018Nanotechnology—Method for the measurement of the nanofilm-thickness by atomic force microscopy (English PDF)

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009.

1 Scope

This standard specifies the principle, test conditions, equipment, samples, test steps for measuring the thickness of nanofilms using atomic force microscopy (AFM). And data processing.

This standard is applicable to inorganic material films with uniform and flat surface thickness in the nanometer range. Film thickness measurement of thicker and some organic films Can also refer to the implementation.

2 Normative references

The following documents are indispensable for the application of this document. For dated references, only dated versions apply to this document. For undated references, the latest edition (including all amendments) applies to this document.

GB/T 31227 Atomic force microscope for measuring the surface roughness of sputtered films

JJF1059.1-2012 Measurement uncertainty evaluation and representation

3 Terms and definitions

The following terms and definitions apply to this document.

4 Principle

First, an atomic force microscope (AFM) test was used to obtain a microscopic morphology including nanofilm steps. Atomic force microscope is making The tip of the sample is contacted with the tip of the sample, and the interaction between the tip and the sample is used as feedback, and the feedback system is based on the detector voltage.

The change continuously adjusts the position of the tip or the z-axis of the sample, and the sample is scanned for the change in the scanning position of the sample.

The surface topography image of the product (see GB/T 31227). Then calculate the height difference between the film and its substrate from the topographical image, that is, The thickness of the film.