GB/T 26533-2011General rules for Auger electron spectroscopic analysis (English PDF)
俄歇电子能谱分析方法通则
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Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
May 12, 2011
Implementation date
December 1, 2011
Scope
GB/T 26533-2011 is the English-translated version of 俄歇电子能谱分析方法通则.
GB/T 26533-2011 is the Chinese standard "General rules for Auger electron spectroscopic analysis". Its scope clause reads: This standard specifies the electron beam excitation source Auger electron spectroscopy (AES, AugerElectronSpectroscopy) general surface Analytical method.
This standard applies to Auger electron spectroscopy. Its clauses include terms and definitions; principle of the method.
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Document preview — GB/T 26533-2011
National Standard of the People's Republic of China
- ICS
- 17.180
- Classification
- N 33
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 principle of the method
- 5 Apparatus
- 5.1 Instrument consisting of
- 5.2 Instrument Performance
- 6 Sample
- 7 Procedure
- 7.1 energy scale calibration
- 7.2 AES Qualitative Analysis and Procedure
- 7.3 Auger electron spectroscopy quantitative analysis
- 7.4 depth analysis
- 7.5 elemental chemical state analysis of
- 8 7 expression analysis
- 8.1 Auger full spectrum
- 8.3 spectral line scan
- 8.4 depth analysis Spectrum
- 8.6 sample surface element distribution (Augermap)
- 8.7 Analysis of the results presentation of
1 Scope
This standard specifies the electron beam excitation source Auger electron spectroscopy (AES, AugerElectronSpectroscopy) general surface
Analytical method.
This standard applies to Auger electron spectroscopy.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 22461-2008 Surface chemical analysis - Vocabulary
ISO /T R15969.2001 Surface chemical analysis to measure the depth analysis sputter depth (SurfaceChemicalAnalysis-
DepthProfiling-MeasurementofSputteredDepth)
ISO 18116.2005 Surface chemical analysis and preparation method of fixing guide surface analysis of the sample (SurfaceChemicalAnal- ysis-GuidelinesforPreparationandMountingofSpecimensforAnalysis)
ISO 18118.2002 (E) Surface chemical analysis AES and XPS quantitative analysis of homogeneous materials used in experiments because of the relative sensitivity
Son Guide (SurfaceChemicalAnalysis-AESandXPS-GuidetouseofExperimentalRelativeSensi- tivityFactorsfortheQuantitativeAnalysisofHomogeneousMaterials)
ISO /T R18394.2006 Surface chemical analysis - Auger electron spectroscopy for chemical sources of information (SurfaceChemical
Analysis-AugerElectronSpectrometers-DerivationofChemicalInformation)
ISO /T R19319.2003 Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy analysis by the lateral resolution
Measured rate, the scope of analysis and sample observation range (SurfaceChemicalAnalysis-AugerEletronSpectroscopyandX- rayPhotoelectronSpectroscopy-DeterminationofLateralResolution, AnalysisArea, andSample
AreaViewedbytheAnalyser)
ASTME1078-2002 surface analysis of sample preparation and sample loading Standard Guide (StandsardGuideforSpecimenPrepa- rationandMountinginSurfaceAnalysis)
ASTME1829-2002 surface analysis sample preparation Standard Guide (StandsardGuideforHandlingSpecimens
PriortoSurfaceAnalysis)
3 Terms and Definitions
Terms and definitions GB/T 22461-2008 defined apply to this document.
4 principle of the method
Atom by electron impact certain energy, inner electron ionization of atoms, such a vacancy occurs on the inner track atom, forming a
Excited positive ions. Excited state ions in excited withdrawal process, the outer orbital electrons can jump to the space and releases energy, which can
The amount they can excite the same track or the outer layer of the track ionization electrons, this electron is the Auger electron. General use WiXpYq table
GB/T 22062-2020 | GB/T 32387-2015 | JY/T 011-1996 | GB/T 47185-2026 | GB/T 23414-2026 | GB/T 17722-2026 | […]
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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.
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