GB/T 26250-2025Electronic gas — Arsine (English PDF)

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1: Structure and drafting rules for standardization documents" Drafting.

This document replaces GB/T 26250-2010 "Gas Arsine for Electronic Industry". Compared with GB/T 26250-2010, except for the structure In addition to adjustments and editorial changes, the main technical changes are as follows.

— Changed the scope (see Chapter 1, Chapter 1 of the 2010 edition);

— Changed the technical requirements that arsine should meet (see Chapter 4, Chapter 3 of the 2010 edition);

— Changed the sampling requirements (see Chapter 5, 4.1.2 of the 2010 edition);

— Changed the purity calculation method (see 6.1, 4.2 of the 2010 edition);

— Changed the determination method of oxygen, argon, nitrogen, carbon monoxide, carbon dioxide, methane and phosphine content (see 6.2, 2010 edition 4.4, 4.5, 4.6, 4.8);

— Added the determination method of ethane, ethylene, germane, silane and hydrogen sulfide content (see 6.2);

— Changed the method for determining moisture content (see 6.3, 4.7 of the 2010 edition);

— Changed the requirements for exhaust gas treatment (see 6.4, 4.3 of the 2010 edition);

— Changed the determination method of metal elements (see 6.5, 4.9 of the 2010 edition);

— Deleted the determination of particles (4.10 of the 2010 edition);

— Changed the inspection rules (see Chapter 7, 4.1 of the 2010 edition);

— Changed the requirements for marking, packaging, transportation and storage (see Chapter 8, 5.1 of the 2010 edition);

— Changed the content of safety information (see 8.3, 5.2 of the 2010 edition).

Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.

This document was proposed and coordinated by the National Technical Committee for Semiconductor Equipment and Materials Standardization (SAC/TC203).

This document was drafted by: Yumen Dayang Tianqing Petrochemical Co., Ltd., Haohua Gas Co., Ltd. Southwest Branch, Shanghai Lizhi Semiconductor Technology Co., Ltd., Quanjiao Nanda Optoelectronic Materials Co., Ltd., Shanghai Yike Gas Co., Ltd., Beijing Purui Analytical Instruments Co., Ltd.

Company, Zhejiang Provincial Institute of Standardization, CSSC (Handan) Perri Special Gas Co., Ltd., Fujian Hengshen Electronic Materials Technology Co., Ltd., Zhonghao Guangming Chemical Research and Design Institute Co., Ltd., Shanghai Huaai Chromatography Analysis Technology Co., Ltd., Dalian Data Gas Co., Ltd., Lianxiong Investment Shanghai Institute of Metrology and Testing Technology, Hangzhou New Century Mixed Gas Co., Ltd., Shenyang Zhongfu Kejin Pressure Vessel Co., Ltd.

Co., Ltd., Dalian Guangming Chemical Industry Gas Quality Monitoring Center Co., Ltd., Suzhou Yvite New Materials Co., Ltd., Beijing Ruixinjie Environmental Protection Technology Co., Ltd., Shanghai Fanwei Instrument Equipment Co., Ltd., and Southwest Chemical Research and Design Institute Co., Ltd.

The main drafters of this document are: Ma Binqi, Ma Jie, Pan Huajie, Ren Ru, Sun Jian, Ye Kai, Qiao Yang, Dong Jianping, Shen Feng, Shi Lan, Cui Wen, Zhao Saidi, Lü Lei, Liu Dan, Sun Funan, Guo Qiong, Lai Xiaofeng, Wang Jianjian, Yi Junting, Du Yutong, Huang Hui, Li Chunhua, Yang Jinshan, Bao Guangqiang, Wang Dawei, Li Ming, Chang Xia, Niu Di, Tan Yiqiang, Yin Lele, Zhao Jie, He Bo, Tang Zhongwei, Zhou Pengyun, Tang Xiamei.

This document was first published in 2010 and this is the first revision. Electronic gas Arsine

1 Scope

This document specifies the technical requirements, sampling, inspection rules, marking, packaging, transportation, storage of arsenic for electronic use, and describes the corresponding test The test method provides safety information of arsine.

This document applies to arsenic for electronic use purified from zinc arsenide as raw material.

2 Normative references

GB 190

GB/T 4844

GB/T 5099

GB/T 5832.3

GB/T 7144

GB/T 11640

GB/T 14193

GB 15258

GB/T 16804

GB/T 28726

GB/T 28727

GB/T 33145

GB/T 34972

GB/T 43306

3 Terms and definitions

There are no terms or definitions that require definition in this document.

4 Technical requirements

The technical requirements for arsine should comply with the provisions of Table 1.