GB/T 21287-2021Electronic specialty gas—Nitrogen trifluoride (English PDF)

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1: Structure and Drafting Rules of Standardization Documents" Drafting.

This document replaces GB/T 21287-2007 "Gas Nitrogen Trifluoride for the Electronic Industry". Compared with GB/T 21287-2007, this document is In addition to structural adjustments and editorial changes, the main technical changes are as follows.

---Changed the technical requirements that nitrogen trifluoride should meet (see Chapter 4, Chapter 3 of the 2007 edition);

--- The requirements for sampling, determination and re-inspection have been changed (see 5.1, 4.1 in the 2007 edition);

---The sampling requirements are changed (see 5.2, 4.1.6 of the 2007 edition);

---Added the requirements for exhaust gas treatment (see 5.3);

---Added the general provisions of the test method (see 6.1);

---Changed the purity calculation method (see 6.2, 4.2 of the 2007 edition);

---Changed the determination method of oxygen, argon, nitrogen, carbon monoxide, carbon dioxide, carbon tetrafluoride, nitrous oxide, sulfur hexafluoride content (see 6.3, 4.3 and 4.4 of the 2007 edition);

---The method for determining moisture content has been changed (see 6.4, 4.6 of the 2007 edition);

---The determination method of hydrolyzable fluoride has been changed (see 6.5, 4.5 in 2007 edition);

--- Changed the logo, packaging, transportation and storage (see Chapter 7, Chapter 5 of the 2007 edition);

--- Changed the safety information (see 7.3, Appendix D of the 2007 edition).

1 Scope

This document specifies the technical requirements, inspection rules, test methods, signs, packaging, transportation and storage and safety information of electronic grade nitrogen trifluoride Requirements.

This document is applicable to the preparation and purification of anhydrous hydrogen fluoride and liquid ammonia as raw materials, or the preparation and purification of trifluoride obtained from ammonium bifluoride as raw materials. Nitrogen.

2 Normative references

The content of the following documents constitutes an indispensable clause of this document through normative references in the text. Among them, dated quotations Only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to this document.

GB 190 Dangerous Goods Packaging Mark

GB/T 601 Preparation of Standard Titration Solution for Chemical Reagents Preparation of preparations and products used in GB/T 603 chemical reagent test method

GB/T 3723 General rules for the sampling safety of industrial chemical products

GB/T 5099 (all parts) seamless steel gas cylinders

GB/T 5832.3 Determination of trace moisture in gases Part 3: Cavity ring-down spectroscopy

GB/T 6682 Analytical laboratory water specifications and test methods

GB/T 7144 Gas cylinder color mark

GB/T 14193 Liquefied Gas Cylinder Filling Regulations

GB 15258 Regulations for the preparation of chemical safety labels

GB/T 16804 Gas cylinder warning label

GB/T 28726 Gas Analysis Helium Ionization Gas Chromatography

GB/T 33145 Large-volume steel seamless gas cylinder TSGR0005 Safety Technical Supervision Regulations for Mobile Pressure Vessels TSG07 Licensing Rules for Special Equipment Production and Filling Units TSG23 Gas Cylinder Safety Technical Regulations

3 Terms and definitions

There are no terms and definitions that need to be defined in this document.

4 Technical requirements

The technical requirements of nitrogen trifluoride should meet the requirements of Table 1.