GB/T 42274-2022Determination of the content and distribution of trace elements (magnesium, gallium) in aluminum nitride materials—Secondary ion mass spectrometry (English PDF)

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1: Structure and Drafting Rules for Standardization Documents" drafting.

1 Scope

This document describes a secondary ion mass spectrometry method for the determination of the content and distribution of trace magnesium and gallium in aluminum nitride single crystals.

This document is applicable to the quantitative determination of the content and distribution of trace magnesium and gallium in aluminum nitride single crystal. The determination range is that the content of magnesium and gallium is not less than 1 x 10^16cm-3, the element content (atomic percentage) is not more than 1%.

Note: The content of the element to be measured in the aluminum nitride single crystal is calculated by the number of atoms per cubic centimeter.

2 Normative references

The contents of the following documents constitute the essential provisions of this document through normative references in the text. Among them, dated references For documents, only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to this document.

GB/T 14264 Terminology of semiconductor materials

GB/T 22461 Surface Chemical Analysis Vocabulary

GB/T 25186 Surface Chemical Analysis Secondary Ion Mass Spectrometry Determination of Relative Sensitivity Factors by Ion Implantation Reference Substances

GB/T 32267 Analytical instrument performance measurement terms

3 Terms and Definitions

The terms and definitions defined in GB/T 14264, GB/T 22461, GB/T 25186 and GB/T 32267 apply to this document.

4 Principles of the method

Under the condition of high vacuum (vacuum degree is better than 10-7Pa), the primary ions generated by the oxygen ion source are accelerated, purified and focused, and bombarded with nitrogen A variety of particles are sputtered on the surface of an aluminum sample, and the secondary ions are extracted, and the ions with different mass-to-charge ratios are separated by a mass spectrometer, and the sample is recorded.

The ratio of the ion count rate of the analyte element 24Mg, 69Ga and the matrix element 27Al in the product. Quantitatively analyzed and calculated using the relative sensitivity factor The content of the element to be measured in the aluminum nitride single crystal.

5 Interfering factors

5.1 Magnesium and gallium adsorbed on the surface of the sample may affect the test results of their content. During the entire operation process, the sample should avoid excessive contact with the outside world.

If touched, purge with dry nitrogen before placing in the cavity.

5.2 Secondary ion mass spectrometers have memory effects. If samples with high magnesium and gallium content are tested, magnesium and gallium may remain in the sample chamber of the instrument. Gallium, which affects test results for magnesium and gallium content.

5.3 Different models of instruments or the state of the same instrument (such as beam current density, focus state, electron multiplier efficiency, visual Field diaphragm and contrast diaphragm size, analysis chamber vacuum, etc.) will affect the detection limit of this method.