GB/T 4061-2009Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion (English PDF)
硅多晶断面夹层化学腐蚀检验方法
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Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
October 30, 2009
Implementation date
June 1, 2010
Scope
GB/T 4061-2009 is the English-translated version of 硅多晶断面夹层化学腐蚀检验方法.
GB/T 4061-2009 is the Chinese standard "Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion".
Its scope clause reads: This standard specifies the order trichlorosilane and silicon tetrachloride as raw material in a reduction furnace hydrogen reduction of silicon polycrystalline rod section sandwich chemical Corrosion test methods.
This standard test on the mezzanine section apply to trichlorosilane and silicon tetrachloride as raw materials for the thin silicon core heating element, in the reduction furnace Hydrogen reduction deposition grow out of polycrystalline silicon rods.
Its clauses include principle of the method; terms; reagents and equipment; sample preparation.
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Document preview — GB/T 4061-2009
National Standard of the People's Republic of China
- ICS
- 29.045
- Classification
- H 80
- Replacing
- GB/T 4061-1983
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- 1 Scope
- 2 principle of the method
- 3 Terms
- 4 Reagents and Equipment
- 5 Sample Preparation
1 Scope
This standard specifies the order trichlorosilane and silicon tetrachloride as raw material in a reduction furnace hydrogen reduction of silicon polycrystalline rod section sandwich chemical
Corrosion test methods.
This standard test on the mezzanine section apply to trichlorosilane and silicon tetrachloride as raw materials for the thin silicon core heating element, in the reduction furnace
Hydrogen reduction deposition grow out of polycrystalline silicon rods.
2 principle of the method
This method uses a chemical etching method, according to the hydrofluoric acid - nitric acid solution on the polycrystalline silicon sandwich section and the temperature difference between the interlayer oxidation corrosion rate
Do not be tested.
3 Terms
3.1
Silica concentric structure of polycrystalline silicon was mixed cross section.
3.2
Due to temperature fluctuations caused by differences in the crystalline density, grain size or color of polycrystalline silicon on the cross-section, showing a crystal silicon core
A ring-like structure of the Centre, also called temperature ring (temperaturecircle).
4 Reagents and Equipment
4.1 Reagents
4.1.1 Water
more than 2Mohm · cm water (25 °C).
4.1.2 Hydrofluoric acid (HF)
chemically pure.
4.1.3 nitric acid (HNO3)
chemically pure.
4.2 Equipment
4.2.1 Containers
hydrofluoric acid corrosion resistant material.
4.2.2 Exhaust hood
the use of acid gas corrosion material.
5 Sample Preparation
5.1 Sampling sites
In addition to the bridge silicon polycrystalline silicon core rod straight lap or polycrystalline silicon rod from graphite chuck 10cm and outdoor sampling period (Figure 1).
5.2 Sample Size
A direction perpendicular to the direction of cut thin silicon core thickness greater than 3mm flat wafers.
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.
Similar standards
Editions of GB/T 4061
| Edition | Title | Revision | Status |
|---|---|---|---|
| GB/T 4061-2009 | Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion | current edition | Current |
| GB/T 4061-1983 | Polycrystalline silicon-examination method-assessment of sandwiches on cross-section by chemical corrosion | previous edition | Superseded |
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