GB/T 34899-2017Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy (English PDF)
微机电系统（MEMS）技术 基于拉曼光谱法的微结构表面应力测试方法
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Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
November 1, 2017
Implementation date
May 1, 2018
Scope
GB/T 34899-2017 is the English-translated version of 微机电系统（MEMS）技术 基于拉曼光谱法的微结构表面应力测试方法.
GB/T 34899-2017 sets out how the surface stress of microstructures is measured by Raman spectroscopy.
Clause 1 states that the standard specifies the method for determining surface residual stress, relative static stress and relative dynamic stress by Raman spectroscopy, and that it applies to Raman spectroscopy testing of those three stresses on the surfaces of micro-electromechanical systems (MEMS) structures.
Clause 4, on the stress test principle, explains that the lattice deforms under stress, that this deformation shifts the Raman frequency of the scattered light, that the stress value is computed from the size of the Raman shift, and that the relationship between structural surface stress and the Raman shift is linear.
The document is built in six clauses, Scope, Normative references, Terms and definitions, stress test principle, test conditions, with subclauses on general matters, sample requirements, calibration requirements, environmental conditions and the test system, and test procedures, with subclauses on calibrating the Raman spectrometer, test system error, selecting the test area, the test procedure, test records, determination of the Raman shift and stress calculation.
Three informative appendices follow, on the conversion relationship between cubic stress and Raman shift, an example of a relative dynamic stress test system, and an example of a Raman spectroscopy test of microstructure surface stress.
Clause 2 cites GB/T 2421.1, GB/T 25915.1, GB/T 26111 and JJF 1544-2015, and clause 3 prints a single definition, for wavenumber, the reciprocal of the wavelength, with the note that the unit is per centimetre.
The foreword names the National Microelectromechanical Technology Standardization Technical Committee (SAC/TC336) as the body in charge. It was issued on 1 November 2017 and has applied since 1 May 2018.
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Document preview — GB/T 34899-2017
National Standard of the People's Republic of China
- ICS
- 31.200
- Classification
- L 55
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- Preface
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 stress test principle
- 5 test conditions
- 5.1 General
- 5.2 Sample Requirements
- 5.3 Calibration Requirements
- 5.4 Environmental conditions
- 5.5 Test System
- 6 test procedures
- 6.1 Calibration Raman spectrometer
- 6.2 Test System Error
- 6.3 Select the test area
- 6.4 Test Procedure
- 6.5 Test Records
- 6.6 Determination of Raman shift
- 6.7 Stress Calculation
- Appendix A (Informative) Cubic stress and Raman shift between the conversion relationship
- Appendix B (informative) relative dynamic stress test system example
- Appendix C (informative) Microstructure surface stress Raman spectroscopy test Example
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
1 Scope
This standard specifies the Raman spectroscopy to determine the surface residual stress, relative static stress, relative dynamics Method of stress.
This standard applies to micro-electromechanical systems (MEMS) structure surface residual stress, relative static stress, relative dynamic stress Raman spectrum Law test.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version applies to this document. For undated references, the latest edition (including all amendments) applies to this document.
GB/T 2421.1 Electrical and Electronic Products Environmental Testing Overview and Guidelines
GB/T 25915.1 cleanroom and related controlled environment Part 1. air cleanliness level
GB/T 26111 Microelectromechanical System (MEMS) technology terminology
JJF 1544-2015 Raman spectrometer calibration specifications Measurement characteristics and calibration requirements
3 Terms and definitions
GB/T 26111 and JJF1544-2015 defined and the following terms and definitions apply to this document.
3.1 Wavenumber
The reciprocal of the wavelength, which is the number of wavelengths contained per centimeter.
Note: The unit is per centimeter (cm-1).
4 Stress test principle
Raman spectroscopy stress test is based on the Raman scattering Raman shift to calculate the surface stress of the material method.
Under the action of stress, the crystal lattice will deform, which will scatter the incident light and lead to the Raman frequency shift. according to The size of the Raman shift can calculate the stress value. The relationship between the structural surface stress and the Raman shift is linear, as shown in Eq. (1).
In the formula.
sigma --- surface stress, in megapascals (MPa);
alpha --- stress factor in units of megapascals per centimeter (cm-1 . MPa-1);
deltaomega --- Raman frequency shift, in units of centimeters (cm-1).
See Appendix A for the conversion relationship between cubic stress and Raman shift.
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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.
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