GB/T 26111-2023Micro-electromechanical system technology - Terms (English PDF)

1 Scope

This document defines terms and definitions related to MEMS devices and their production processes:

This document is applicable to research, development, evaluation and application in the field of MEMS:

2 Normative references

This document has no normative references:

3 Terms and Definitions

3:1 General terms and definitions

3:1:1

A system composed of functional structures and devices based on micro-nano manufacturing technology:

Note: Micro-sensors, micro-actuators, micro-fluidic devices, micro-energy sources, etc:, as well as integration with circuits such as signal processing and control:

3:1:2

Miniaturized devices that integrate sensors, actuators, transducers, resonators, oscillators, mechanical components and/or circuits:

Note: From basic technologies such as design, materials, processing, functional components, system control, energy supply, bonding and assembly, circuits, and evaluation to microscience and engineering, microscopic

The basic sciences such as thermodynamics and tribology of the scale, and the related technologies vary greatly: If these devices form a system, usually called MEMS, are

3:1:3

The technology of obtaining microelectronic, optical and mechanical systems and their components by micromachining:

Note: The term MST is mainly used in Europe:

3:1:4

Micromachine micromachine

3:1:4:1 micromachine< device> micromachine< device>

Miniaturized devices with component dimensions of a few millimeters or less:

NOTE: Includes various functional devices (such as sensors utilizing micromechanical technology):

3:1:4:2 micromachine< system> micromachine< system>

A microsystem integrated by micromechanical devices:

NOTE: Includes molecular machines known as nanomachines: