GB/T 25915.10-2021Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (English PDF)
洁净室及相关受控环境 第10部分：按化学物浓度划分表面洁净度等级
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Issued by
State Administration for Market Regulation, China National Standardization Administration
Level / Type
National · Recommended
Issue date
August 20, 2021
Implementation date
March 1, 2022
Scope
GB/T 25915.10-2021 is the English-translated version of 洁净室及相关受控环境 第10部分：按化学物浓度划分表面洁净度等级.
GB/T 25915.10-2021 is the Chinese standard "Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration".
Its scope clause reads: This document defines the surface cleanliness of the presence of relevant compounds or chemical substances (including molecules, ions, atoms, and particles) in a clean room.
Clarity grading system. This document applies to all surfaces in clean rooms and related controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and Device.
Note 1.This document only considers the chemical properties of microparticles, and does not consider the physical properties of microparticles. This document does not cover the interaction between contaminants and surfaces.
Note 2.This document does not involve the process of pollution generation, and does not involve time-related influencing factors (sedimentation, sedimentation, aging, etc.) and process-related activities (Such as transfer, processing, etc.), nor does it involve statistical quality control technical guidelines to ensure compliance. Its clauses include terms and definitions.
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Document preview — GB/T 25915.10-2021
National Standard of the People's Republic of China
- Classification
- C 70
Issued by: State Administration for Market Regulation, China National Standardization Administration
Contents
- Foreword
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Rating
- 5 Surface cleanliness inspection/measurement, monitoring and conformity certification of chemical pollution
- Appendix A (Informative) Conversion of various concentrations of surface chemicals
- Appendix B (informative) Factors affecting the test and results
- Appendix C (informative) Basic elements of cleanliness assessment
- Appendix D (informative) Method of testing surface cleanliness by chemical concentration
- Appendix E (Informative) Test Report
- References
1 Scope
This document defines the surface cleanliness of the presence of relevant compounds or chemical substances (including molecules, ions, atoms, and particles) in a clean room.
Clarity grading system.
This document applies to all surfaces in clean rooms and related controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and
Device.
Note 1.This document only considers the chemical properties of microparticles, and does not consider the physical properties of microparticles. This document does not cover the interaction between contaminants and surfaces.
Note 2.This document does not involve the process of pollution generation, and does not involve time-related influencing factors (sedimentation, sedimentation, aging, etc.) and process-related activities (Such as transfer, processing, etc.), nor does it involve statistical quality control technical guidelines to ensure compliance.
2 Normative references
The contents of the following documents constitute the indispensable clauses of this document through normative references in the text. Among them, dated quotations
Only the version corresponding to that date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to
This document.
GB/T 25915.6 Clean room and related controlled environment Part 6.Vocabulary (GB/T 25915-2010, ISO 14644-6.2007,
IDT)
Note. ISO 14644-6.2007 has been abolished, and my country still retains the corresponding national standard.
3 Terms and definitions
The following terms and definitions defined in GB/T 25915.6 apply to this document.
3.1 Classified by chemical concentration air cleanliness aircleanlinessbychemicalconcentration; ACC
The maximum allowable concentration of a given chemical substance or group of chemical substances is expressed in ISO -ACCN grade, and the unit is grams per cubic meter (g/m3).
Note. This definition does not include biological macromolecules, biological macromolecules are regarded as microparticles.
3.2 Contaminantcategory
A collective term for a group of compounds that have specific and similar hazards when deposited on a surface of interest.
3.3 Chemical contamination
Chemical substances (non-fine particles) that are harmful to products, processes, or equipment.
3.4 Solid surface
The interface between the solid phase and another phase.
3.5 Surface
The interface between the two phases.
GB/T 25915.14 | GB/T 25915.2 | GB/T 25915.1 | GB/T 25915.3 | GB/T 25915.17 | GB/T 25915.16 | […]
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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 51 pages — is available in the English PDF.
Referenced standards
Normative references
GB/T 25915-2010 · ISO 14644
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Related Standards
GB/T 25915.6-2010 — Cleanrooms and associated controlled environments -- Part 6: Vocabulary
GB/T 25915.1-2021 — Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
GB/T 25915.12-2021 — Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring of air cleanliness by nanoscale particle concentration
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