GB/T 30453-2013Metallographs collection for original defects of crystalline silicon (English PDF)
硅材料原生缺陷图谱
This is a limited preview
Buy now to download the full PDF (66 pages)
Need quotation for your management?
Get a formal quotation for GB/T 30453-2013 in 30 minutes.
Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
December 31, 2013
Implementation date
October 1, 2014
Scope
GB/T 30453-2013 is the English-translated version of 硅材料原生缺陷图谱.
GB/T 30453-2013 is the Chinese standard "Metallographs collection for original defects of crystalline silicon".
Its scope clause reads: This standard gives a variety of native defects in polycrystalline silicon, monocrystalline silicon, wafers and epitaxial silicon wafers and other silicon materials and their closely related induced defects Terms and morphology patterns.
Analysis of its causes and elimination methods. This standard applies to testing the production of polycrystalline silicon research, monocrystalline silicon, silicon and epitaxial silicon wafers and other silicon materials in a variety of defects.
Silicon devices, set Research into the production circuit may also refer to this standard. Its clauses include terms and definitions.
Found what you need?
Document preview — GB/T 30453-2013
National Standard of the People's Republic of China
- ICS
- 29.045
- Classification
- H 80
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 5 silicon single crystal defects
- 6 9 silicon processing defects
- 7 silicon wafer defect
- Appendix A (informative) hydrogen-induced defects
1 Scope
This standard gives a variety of native defects in polycrystalline silicon, monocrystalline silicon, wafers and epitaxial silicon wafers and other silicon materials and their closely related induced defects
Terms and morphology patterns. Analysis of its causes and elimination methods.
This standard applies to testing the production of polycrystalline silicon research, monocrystalline silicon, silicon and epitaxial silicon wafers and other silicon materials in a variety of defects. Silicon devices, set
Research into the production circuit may also refer to this standard.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 1554 crystallographic perfection of silicon by preferential etch test methods
GB/T 4058 Test Method polished silicon oxide induced defects
GB/T 14264 semiconductor material terms
3 Terms and Definitions
Terms and definitions GB/T 14264 apply to this document defined.
Incompleteness polycrystalline silicon structure 4
4.1 coarse grains
4.1.1 Characteristics
The trichlorosilane (SiHCl3) or silicon tetrachloride (SiCl4) and hydrogen reduction of silane (SiH4) thermal decomposition grown polycrystalline silicon, dense surface
And crystallite size, and qualified polycrystalline significant differences (see Fig. 1 to 4).
4.1.2 Causes
When the deposition of polycrystalline growth rate too fast, high temperature, easy to produce coarse particles.
4.1.3 The Effect of Single Crystal
Ago to the cleaning process for preparing a single crystal grain material difficult, and become sources of impurities in a single crystal.
4.1.4 Elimination
Reasonable control of the deposition rate, the ratio of the feed control, adjust the gas flow rate.
4.2 Temperature circle
4.2.1 Characteristics
Under normal circumstances, the polycrystalline silicon grains form cross section or radial radiation dendritic growth (see Figure 5). But sometimes it can be observed in the silicon core […]
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 66 pages — is available in the English PDF.
Referenced standards
Similar standards
How to Download GB/T 30453-2013
- 1
Add to cart
Click "Download PDF" on this page and choose "Buy this standard". You can add more standards before checkout.
- 2
Checkout
Enter your email and billing details. Payment is processed securely by Stripe (cards or bank transfer). Prefer bank details? Request a quotation (min. order $300).
- 3
Instant delivery (0–9 sec)
Delivery is automatic: within seconds of payment you'll receive an email with a secure download link. The link stays valid for 72 hours.
- 4
Invoice included
A tax invoice is attached to the confirmation email. Need a custom invoice? Contact us.
Related Standards
GB/T 10003-2026 — Biaxially oriented polypropylene (BOPP) film
GB/T 10004-2026 — Plastic/Plastic laminated films and pouches for packaging
GB/T 10007-2026 — Rigid cellular plastics - Determination of shear properties
Secure payment via Stripe
Payments accepted
GB/T 30453-2013
$1,100.00