GB/T 25755-2010Vacuum technology - Sputter-ion pumps - Measurement of performance characteristics (English PDF)
真空技术 溅射离子泵 性能参数的测量
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Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
December 23, 2010
Implementation date
October 1, 2011
Scope
GB/T 25755-2010 is the English-translated version of 真空技术 溅射离子泵 性能参数的测量.
GB/T 25755-2010 is the Chinese standard "Vacuum technology - Sputter-ion pumps - Measurement of performance characteristics". Its scope clause reads: This standard specifies the method for measuring sputter ion pump (hereinafter referred to as the ion pump) performance parameters.
This standard applies to nominal volumetric flow rate of greater than 10L/s ion pump. The standard measurement of the volume flow rate of the pressure range from 1.5 × 10-3Pa to 1 × 10-7Pa.
Note. This standard ensures that the ion pump performance parameters measured under the same conditions in the same manner. Thus do by the manufacturer or laboratories Measurements made with the manufacturers in a given sample data is comparable. Its clauses include terms and definitions.
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Document preview — GB/T 25755-2010
National Standard of the People's Republic of China
- ICS
- 23.160
- Classification
- J 78
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- 1 Scope
- 2 Normative references
- 3 Terms and Definitions
- 3.1 Extreme pressure
- 3.2 Minimum working pressure
- 3.3 Nominal pumping speed
1 Scope
This standard specifies the method for measuring sputter ion pump (hereinafter referred to as the ion pump) performance parameters.
This standard applies to nominal volumetric flow rate of greater than 10L/s ion pump.
The standard measurement of the volume flow rate of the pressure range from 1.5 × 10-3Pa to 1 × 10-7Pa.
Note. This standard ensures that the ion pump performance parameters measured under the same conditions in the same manner. Thus do by the manufacturer or laboratories
Measurements made with the manufacturers in a given sample data is comparable.
2 Normative references
The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent
Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research
Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard.
GB/T 3163 vacuum technical terms (GB/T 3163-2007, ISO 3529. 1981, MOD).
3 Terms and Definitions
GB/T 3163 and established the following terms and definitions apply to this standard.
3.1 Extreme pressure
Test cover gradually approaching pressure.
Note 1. It is the lowest pressure of the pump can be obtained.
Note 2. It is recommended not to the manufacturer's instructions given limit pressure value. This standard does not give ultimate pressure measurement procedures. However, if the manufacturer lists the limit
Pressure, it should be noted that the completion of the measurement conditions.
3.2 Minimum working pressure
p0
Closing the intake valve at the pump, after the end of the baking process 48h internal tests cover approaching the minimum pressure.
Volumetric flow rate volumeflowrate qV
Under ideal conditions, the volume of gas flow per unit time from the test ion pump inlet cover.
Note 1. For the reasons actual measured ion pump for a given volume of gas flow rate is generally agreed to be equal to the flow of the gas is given a point of equilibrium pressure
Manufacturers, using volumetric flow rate units of cubic meters per second (m3/s) or liters per second (L/s).
Note 2. Sometimes the term "pumping speed" and the symbol "s" instead of the volumetric flow rate.
3.3 Nominal pumping speed
Sn
The maximum value of the ion pump saturation measured volumetric flow rate is referred to as the nominal pumping speed.
Note 1. This test should be given in the nominal pumping speed measured pressure p.
Note 2. If the nominal pumping speed of an ion pump as a symbol, it is generally not exceed 10% of the actual measured values.
HG/T 6093-2022 | GB 19815-2021 | JB/T 8947-2008 | GB/T 25753.4-2015 | GB/T 25754-2010 | GB/T 25752-2010 | […]
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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.
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