GB/T 35049-2018Vacuum technology—Leak testing method by quadrupole mass spectrometer (English PDF)
真空技术 四极质谱检漏方法
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Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
May 14, 2018
Implementation date
December 1, 2018
Scope
GB/T 35049-2018 is the English-translated version of 真空技术 四极质谱检漏方法.
GB/T 35049-2018 describes how to find and measure leaks with a quadrupole mass spectrometer.
It defines response time, clean-up time, calibrated leaks, pressure leaks and the background signal, then sets general requirements for the environment, the equipment, tracer gas purity and selection, personnel qualification, choice of mass number and instrument calibration.
Four leak detection methods are given with their procedures: the spraying method, the vacuum chamber method, the non-vacuum accumulation method and the sniffer method.
It also specifies the leak detection record and report, with normative annexes giving the record forms for each method and the report form. The standard applies to leak testing of components, subsystems and complete systems in the vacuum industry and elsewhere. It was issued on 14 May 2018 and has applied since 1 December 2018.
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Document preview — GB/T 35049-2018
National Standard of the People's Republic of China
- ICS
- 23.160
- Classification
- J 78
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- Foreword
- Introduction
- 1 Scope
- 2 Normative references
- 3 Terms and Definitions
- 4 General requirements
- 4.1 Environmental Requirements
- 4.2 Equipment Requirements
- 4.3 Tracer gas purity
- 4.4 Personnel qualification
- 4.5 Tracer Gas Selection
- 4.6 Quality number selection
- 4.7 Instrument Calibration
- 5 leak detection method
- 5.1 blowing method
- 5.2 Vacuum chamber method
- 5.3 Quadrupole mass spectrometry non-vacuum accumulation method
- 5.4 Sniffer method
- 6 leak detection files
- 6.1 Leak Detection Record
- 6.2 Leak Detection Report
- Appendix A (Normative Appendix) Leak Detection Records for Four Leak Detection Methods
- Appendix B (Normative Appendix) Leak Detection Report
Foreword
This standard was drafted in accordance with the rules given in GB/T 1.1-2009.
Introduction
The quadrupole mass spectrometer is widely used in aerospace, aviation, and has many advantages in detecting substances, high sensitivity in leak detection, and stable test results.
Leak detection in the fields of electronics, nuclear power, and vacuum. However, there is currently no uniform, standardized leak rate determination based on quadrupole mass spectrometer leak detection.
Measurement methods and standards, so that the detection methods and calculation methods used by vacuum and other units in different industries are different, making it impossible Give full play to the advantages of qualitative and quantitative detection, and the test results between various industry units are not comparable, so quadrupole mass spectrometry leak detection The application of the law in various industries is greatly restricted, which is not conducive to the promotion and application of quadrupole mass spectrometers in various industries.
The development of this standard can standardize the method selection, operation flow, operation steps of the quadrupole mass spectrometer in the product sealing performance testing process.
The results are calculated, which makes the results of quadrupole mass spectrometry leak detection between different industries and fields comparable, thus improving the product sealing quality and increasing production. Sealing reliability of the product.
1 Scope
This standard specifies the general requirements for the implementation of four commonly used quadrupole mass spectrometry leak detection methods. Each type of leak detection method is applied to the system and system group.
Requirements for procedures, leak detection procedures, etc. and requirements for leak detection documents.
This standard is applicable to the leak detection work using the quadrupole mass spectrometer in the vacuum industry and other industries. It is applicable to the component level and sub-component. Sealing performance testing of system-level and system-level products.
2 Normative references
The following documents are indispensable for the application of this document. For dated references, only dated versions apply to this document. For undated references, the latest edition (including all amendments) applies to this document.
GB/T 9445 Non-destructive testing personnel qualification and certification
GB/T 12604.7 Non-destructive testing term leak detection
GB/T 13966 Analytical Instrument Terminology
3 Terms and definitions
The following terms and definitions as defined in GB/T 12604.7 and GB/T 13966 apply to this document.
3.1 Response time
From the application of the tracer gas to the inlet end of the leak hole, to the mass spectrometer output indication (deducting the background value) to reach the maximum change value (deducting the background value) The time elapsed after 63% of the leak signal value).
Note: The unit is seconds (s).
3.2 Clear time
Start by applying the tracer gas from the inlet end of the leak hole, and output the indicated value (minus the background value) to the quadrupole mass spectrometer.
The time elapsed when 37% of the maximum leak signal value (after subtracting the background value).
3.3 Calibrate the leak hole
A calibration leak that provides a known flow rate to a specified gas under specified conditions (temperature, pressure).
3.4 Positive pressure calibration leak
The inlet end pressure is higher than one atmosphere, the outlet end pressure is one atmosphere, and a calibrated leak is known for a certain gas leak rate.
3.5 Background signal
Quadrupole mass spectrometry in the absence of tracer gas, due to residual tracer gas or other factors that can cause the response of the leak detector The instrument produces a stable or fluctuating output signal.
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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 23 pages — is available in the English PDF.
Referenced standards
Normative references
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Related Standards
GB/T 12604.7-2021 — Non-destructive testing - Terminology - Leak testing
GB/T 13966-2013 — Terminology for analytical instruments
GB/T 9445-2024 — Non-destructive testing - Qualification and certification of personnels
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