GB/T 18867-2025Electronic gas — Sulphur hexafluoride (English PDF)

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1: Structure and drafting rules for standardization documents" Drafting.

This document replaces GB/T 18867-2014 "Gas Sulfur Hexafluoride for Electronic Industry". Compared with GB/T 18867-2014, In addition to structural adjustments and editorial changes, the main technical changes are as follows.

— Changed the scope (see Chapter 1, Chapter 1 of the 2014 edition);

— Changed the technical requirements that sulfur hexafluoride should meet (see Chapter 4, Chapter 3 of the 2014 edition);

— Changed the sampling requirements (see Chapter 5, 4.1.3, 4.1.5 of the 2014 edition);

— Changed the purity calculation method (see 6.1, 4.2 of the 2014 edition);

— Changed the determination method of oxygen argon, nitrogen, carbon tetrafluoride, carbon monoxide, carbon dioxide and methane content (see 6.2, 2014 edition 4.3);

— Added the determination method of hydrogen, hexafluoroethane and octafluoropropane content (see 6.2);

— Added requirements for exhaust gas treatment (see 6.6);

— Changed the inspection rules (see Chapter 7, 4.1 of the 2014 edition);

— Changed the requirements for marking, packaging, transportation and storage (see 8.1, 8.2, 5.1 of the 2014 edition);

— Changed the content of safety information (see 8.3, 5.2 of the 2014 edition).

Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.

This document was proposed and coordinated by the National Technical Committee for Semiconductor Equipment and Materials Standardization (SAC/TC203).

This document was drafted by: Haohua Gas Co., Ltd., Fujian Del Technology Co., Ltd., Zhejiang Chemical Research Institute Co., Ltd., Fujian Yongjing Technology Co., Ltd., Shanghai Shangpeng Electric Co., Ltd., Beijing Purui Analytical Instruments Co., Ltd., Nanjing University of Science and Technology Optoelectronics (Zibo) Co., Ltd.

Co., Ltd., CSSC (Handan) Perri Special Gas Co., Ltd., Guangdong Huate Gas Co., Ltd., Fujian Hengshen Electronic Materials Technology Co., Ltd., Haohua Gas Co., Ltd. Southwest Branch, Zhonghao Guangming Chemical Research and Design Institute Co., Ltd., Dalian Data Gas Co., Ltd., Shanghai Huaai Chromatography Analysis Technology Co., Ltd., Lianxiong Investment (Shanghai) Co., Ltd., Hangzhou New Century Mixed Gas Co., Ltd., Shenyang Zhongfu Kejin Pressure Vessel Co., Ltd., Suzhou Ivite New Materials Co., Ltd., Beijing Ruixinjie Environmental Protection Technology Co., Ltd., Guangdong Power Grid Co., Ltd.

Served as the Electric Power Research Institute of the company, the Electric Power Research Institute of State Grid Shandong Electric Power Company, Shenzhen Power Supply Bureau Co., Ltd., State Grid Hunan Electric Power Co., Ltd. Electric Power Science Research Institute, Shanghai Fanwei Instrument Equipment Co., Ltd., and Southwest Chemical Industry Research and Design Institute Co., Ltd.

The main drafters of this document are: Chen Xinglong, Tang Yuezhen, Chen Shihua, Lin Derong, Shi Wanjun, Zhong Huifei, Liu Chunhua, Li Wen, Chen Kai, Shi Lan, Huang Xiurong, Zhang Yanzhi, Zhang Lulu, Chen Yanshan, Lü Lei, Xie Shipeng, Guo Qiong, Sun Funan, Yi Junting, Du Yutong, Fang Hua, Huang Hui, Yang Jinshan, Bao Guangqiang, Wang Dawei, Li Ming, Tan Yiqiang, Yin Lele, Zhao Jie, Tang Nian, Li Li, Qi Guodong, Tang Feng, Wu Junjie, He Bo, Tang Zhongwei, Lai Xiaofeng, Zhou Pengyun and Tang Xiamei.

This document was first published in 2002, revised for the first time in 2014, and this is the second revision.

1 Scope

This document specifies the technical requirements, sampling, inspection rules, marking, packaging, transportation, storage of sulfur hexafluoride for electronic use, and describes the corresponding The test method provides safety information for sulfur hexafluoride.

This document applies to sulfur hexafluoride for electronic use obtained by purifying industrial sulfur hexafluoride as raw material.

2 Normative references

GB 190

GB/T 4844

GB/T 5099

GB/T 5832.3

GB/T 7144

GB/T 11640

GB/T 12022

GB/T 14193

GB 15258

GB/T 16804

GB/T 28726

GB/T 33145

GB/T 34528

GB/T 43306

3 Terms and definitions

There are no terms or definitions that require definition in this document.

4 Technical requirements

The technical requirements for sulfur hexafluoride shall comply with the provisions of Table 1.