GB/T 46384.1-2025Determination of acidity in electronic gas - Part 1: Fourier transform infrared spectroscopy (English PDF)

1 Scope

This document describes a test method for determining the acidity of gases using Fourier transform infrared spectroscopy, including the method principle, test conditions, and test procedures.

Agents and materials, instruments and equipment, sampling, test procedures, precision and measurement uncertainty, quality assurance and control, test reports, etc.

This document applies to the determination of acidity in electronic gases.

Measurement range. 0.1×10^-^6 (mole fraction) ~ 10×10^-^6 (mole fraction).

2 Normative references

The contents of the following documents, through normative references within the text, constitute essential provisions of this document. Dated citations are not included.

For references to documents, only the version corresponding to that date applies to this document; for undated references, the latest version (including all amendments) applies.

This document.

GB/T 4844 Pure Helium, High-Purity Helium and Ultra-Purity Helium

GB/T 8979 Pure Nitrogen, High-Purity Nitrogen and Ultra-Purity Nitrogen

GB/T 10628 Gas Analysis Calibration - Determination and Verification Comparison Method of Mixture Composition

GB/T 14850 Glossary of Gas Analysis

GB/T 21186 Fourier Transform Infrared Spectrometer

GB/T 43306 Sampling Guidelines for Gas Analysis

GB/T 45133 Gas Analysis - Determination of Composition of Gas Mixtures - Comparative Method Based on Single-Point and Two-Point Calibration

HG/T 5896 High Purity Air

3 Terms and Definitions

The terms and definitions defined in GB/T 14850, GB/T 21186 and GB/T 43306, as well as the following terms and definitions, apply to this document.

4 Principles

Based on the Michelson interferometry principle, after the interfering light passes through the sample, the interfering light containing sample information reaches the detector and is then transformed by Fourier transform.

The signal is processed to obtain an infrared absorption spectrum of absorbance as a function of wavenumber or wavelength. This is achieved by considering parameters such as optical path length, gas temperature, and pressure within the gas cell.

Under constant conditions, absorbance is directly proportional to the content of gaseous components in the sample. By comparing the absorbance with that of a standard sample, the content of gaseous components in the sample can be determined. […]