GB/T 41805-2022Methodology for the quantitative inspection of the defect on optics surface—Microscopic scattering dark-field imaging (English PDF)

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1: Structure and Drafting Rules for Standardization Documents" to be drafted.

Introduction

GB/T 1185-2006 is the standard for visual detection of surface defects of optical components, which is mainly used in strong light or certain lighting conditions Next, the method of determining the defect scale by visual observation of the comparison target board. The visual method has strong subjectivity and poor repeatability, and the backward detection method It has seriously restricted the development of modern scientific research and industrial online detection. This document retains the GB/T 1185-2006 table of optical components In order to evaluate the standard of facial blemishes, a quantitative evaluation method of microscopic scattering dark-field optical imaging system and digital processing is proposed. The establishment of this standard will Our country provides effective digital quantitative inspection for all kinds of precision optical components in various links such as processing technology, optical coating, and industrial online inspection. measurement method.

This document introduces the terms and definitions used in optical components for microscattering dark field imaging, and describes the ring illumination source and microscattering dark field Principles and construction methods of detection equipment composed of imaging systems, test conditions, sample types of optical components, image acquisition, image preprocessing, image Threshold segmentation, image morphology processing, defect classification, digital calibration method, test data processing and test report form are basically applicable to Quantitative detection of surface imperfections on all optical components.

For the digital quantitative detection method, the measurement method of detection repeatability and relative error is introduced in Appendix A. For large diameter flat For the detection of surface optical components, the scanning stitching method of sub-apertures using micro-scattering dark-field imaging is introduced in Appendix B. In Appendix C The method of making comparison standard board for defect scale evaluation is introduced.

In order to avoid technical barriers, this document only recommends and introduces the layout of the quantitative detection device for surface defects of planar optical components.

For example, the specific structure types such as the micro-scattering dark-field optical imaging system and the mechanical transduction device required for sub-aperture scanning are not limited, as long as they can satisfy Microscattering dark-field imaging environment is enough.

1 Scope

This document describes the detection principle, test conditions, Instruments and equipment, samples, testing procedures, test data processing and test reports.

This document is applicable to the detection of the length, width, light-blocking area and defect position on the surface of flat double-sided polished optical components.

2 Normative references

The contents of the following documents constitute the essential provisions of this document through normative references in the text. Among them, dated references For documents, only the version corresponding to the date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to this document.

GB/T 1185-2006 Surface defects of optical parts

3 Terms and Definitions

The following terms and definitions defined in GB/T 1185-2006 apply to this document.