GB/T 40418-2021Electronic specialty gas—Fluoromethane (English PDF)
电子特气 氟甲烷
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Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
August 20, 2021
Implementation date
March 1, 2022
Scope
GB/T 40418-2021 is the English-translated version of 电子特气 氟甲烷.
GB/T 40418-2021 is the Chinese national product standard for electronic grade fluoromethane, a specialty gas used in semiconductor manufacturing. It covers electronic grade fluoromethane obtained by purifying industrial fluoromethane, and sets its technical requirements, which are set out in a table.
It also lays down the inspection rules and the test methods, with references to trace moisture measurement by the electrolysis method and helium ionization gas chromatography, together with marking, packaging, transport and storage.
Filling and cylinder rules come from the seamless steel and large-volume cylinder standards, the cylinder colour and warning label standards and the TSG safety regulations. It was issued on 20 August 2021 and has applied since 1 March 2022.
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Document preview — GB/T 40418-2021
National Standard of the People's Republic of China
- ICS
- 71.100.20
- Classification
- G 86
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- Foreword
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 Technical requirements
Foreword
This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for Standardization Work Part 1: Structure and Drafting Rules of Standardization Documents" Drafting.
1 Scope
This document specifies the technical requirements, inspection rules, test methods, marking, packaging, transportation and storage requirements for electronic grade fluoromethane.
This document is applicable to electronic grade fluoromethane prepared by purification of industrial fluoromethane.
2 Normative references
The contents of the following documents constitute the indispensable clauses of this document through normative references in the text. Among them, dated quotations Only the version corresponding to that date is applicable to this document; for undated reference documents, the latest version (including all amendments) is applicable to this document.
GB 190 Dangerous Goods Packaging Mark
GB/T 601 Preparation of Standard Titration Solution for Chemical Reagents
Preparation of preparations and products used in GB/T 603 chemical reagent test method
GB/T 3723 General Rules for Sampling Safety of Industrial Chemical Products
GB/T 5099 (all parts) seamless steel gas cylinders
GB/T 5832.1 Gas Analysis Determination of Trace Moisture Part 1: Electrolysis Method
GB/T 6682 Analytical laboratory water specifications and test methods
GB/T 7144 Gas cylinder color mark
GB/T 14193 Liquefied Gas Cylinder Filling Regulations
GB 15258 Regulations for the preparation of chemical safety labels
GB/T 16804 Gas cylinder warning label
GB/T 28726 Gas Analysis Helium Ionization Gas Chromatography
GB/T 33145 Large-volume steel seamless gas cylinder
TSGR0005 Safety Technical Supervision Regulations for Mobile Pressure Vessels
TSG23 Gas Cylinder Safety Technical Regulations
3 Terms and definitions
There are no terms and definitions that need to be defined in this document.
4 Technical requirements
The technical requirements of fluoromethane should meet the requirements of Table 1.
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.
Referenced standards
Normative references
- GB 190Packing symbol of dangerous goods
- GB/T 601Chemical Reagent - Preparations of Standard Volumetric Solutions
- GB/T 603Chemical reagent - Preparations of reagent solutions for use in test methods
- GB/T 3723Sampling of chemical products for industrial use. Safety in sampling
- GB/T 5832.1Gas analysis - Determination of water - Part 1: Electrolytic method
- GB/T 6682Water for analytical laboratory use - Specification and test methods
GB/T 5099 · GB/T 14193 · TSG R0005 · TSG 23
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Related Standards
GB 15258-2009 — General rules for preparation of precautionary label for chemicals
GB 190-2009 — Packing symbol of dangerous goods
GB 1900-2010 — National food safety standards of food additives dibutyl hydroxy toluene (BHT)
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GB/T 40418-2021
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