GB/T 34898-2017Micro electromechanical system technology - Test method for the nonlinear vibration of the MEMS resonant sensitive element (English PDF)

1 Scope

This standard specifies the resonant resonator MEMS resonant sensor (hereinafter referred to as the sensor) nonlinear vibration characteristics of the parameters

Test Methods.

This standard applies to sensitive components in the development and production of non-linear vibration characteristics and sensitive components of the closed-loop system frequency offset

Test, other non-MEMS sensitive components can be used for reference.

2 Normative references

The following documents for the application of this document is essential. For dated references, only the dated version applies to this article

Pieces. For undated references, the latest edition (including all amendments) applies to this document.

GB/T 2298 mechanical vibration and shock terms

GB/T 26111 Microelectromechanical System (MEMS) technology terminology

GB/T 26112 Microelectromechanical system (MEMS) micromechanical evaluation of the general principles

3 Terms and definitions

GB/T 2298 and GB/T 26111 and define the following terms and definitions apply to this document.

4 Sensitive element nonlinear vibration test parameters

The characteristic parameters of the nonlinear vibration test of sensitive components are mainly included.

a) Nonlinear vibration amplitude response A (omega), dimensionless;

b) Nonlinear vibration phase frequency response P (omega), in radians (rad);

c) Nonlinear vibration amplitude frequency response bending factor b, in radians per second per second (rad · s-1 · m-2);

d) nonlinear jump amplitude threshold ac, in meters (m);