GB/T 34893-2017Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer (English PDF)
微机电系统（MEMS）技术 基于光学干涉的MEMS微结构面内长度测量方法
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Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
November 1, 2017
Implementation date
May 1, 2018
Scope
GB/T 34893-2017 is the English-translated version of 微机电系统（MEMS）技术 基于光学干涉的MEMS微结构面内长度测量方法.
GB/T 34893-2017 is the Chinese standard "Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer".
Its scope clause reads: This standard specifies the method based on optical interference microscopy to obtain the surface morphology of MEMS micro-structures for in-plane length measurement.
This standard applies to the surface reflectance of not less than 4%, the aspect ratio of not less than 1.10, and the use of optical interference microscope can obtain topography MEMS microstructure. Its clauses include terms and definitions; measurement method.
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Document preview — GB/T 34893-2017
National Standard of the People's Republic of China
- ICS
- 31.200
- Classification
- L 55
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 4 measurement method
1 Scope
This standard specifies the method based on optical interference microscopy to obtain the surface morphology of MEMS micro-structures for in-plane length measurement.
This standard applies to the surface reflectance of not less than 4%, the aspect ratio of not less than 1.10, and the use of optical interference microscope can obtain topography
MEMS microstructure.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version applies to this article
Pieces. For undated references, the latest edition (including all amendments) applies to this document.
GB/T 3505 Geometrical product specifications (GPS) Surface texture contouring Terms, definitions, and surface texture parameters
GB/T 26111 Microelectromechanical System (MEMS) technology terminology
General principles of microgeometry assessment of microelectromechanical systems (MEMS) GB/T 26113
3 Terms and definitions
GB/T 3505 and GB/T 26111 and define the following terms and definitions apply to this document.
3.1 Surface topography
Macroscopic and microscopic geometric properties of surface structures.
Note. Generally includes the surface geometry, surface waviness, surface roughness and surface defects.
3.2 In-plane length
Two points on the surface that have edge structure features, the distance between a point and a line or two lines.
4 measurement method
4.1 General
4.1.1
The implementation of in-plane length measurement premise is that the MEMS structure has a stepped edge structure between the two edge structures (End 1 and End 2)
The distance is the in-plane length of the microstructure measured, as shown in Figure 1.
......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.
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