GB/T 34879-2017Geometrical product specifications (GPS)—Metrological characteristics and guide to uncertainty of measurement for optical confocal microscopes (English PDF)
产品几何技术规范（GPS） 光学共焦显微镜计量特性及测量不确定度评定导则
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Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
November 1, 2017
Implementation date
May 1, 2018
Scope
GB/T 34879-2017 is the English-translated version of 产品几何技术规范（GPS） 光学共焦显微镜计量特性及测量不确定度评定导则.
GB/T 34879-2017 is the Chinese standard "Geometrical product specifications (GPS)—Metrological characteristics and guide to uncertainty of measurement for optical confocal microscopes".
Its scope clause reads: This standard describes the optical confocal microscope in macro or micro three-dimensional surface shape measurement measurement characteristics, and provides for measurement uncertainty Method of reading the indication of the lateral and axial measurements of the rating.
This standard applies to industrial measurement optical confocal microscope. Its clauses include terms and definitions.
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Document preview — GB/T 34879-2017
National Standard of the People's Republic of China
- ICS
- 17.040.30
- Classification
- J 04
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- 1 Scope
- 2 Normative references
- 3 Terms and definitions
- 3.1 Confocal microscopy confocalmicroscopy; CM
- 3.2 Lighting pattern
- 3.3 Detection pattern
- 3.4 Optical chromatography capability
- 3.5 Plane scanning
- 3.6 Axial scanning of axialscan
1 Scope
This standard describes the optical confocal microscope in macro or micro three-dimensional surface shape measurement measurement characteristics, and provides for measurement uncertainty
Method of reading the indication of the lateral and axial measurements of the rating.
This standard applies to industrial measurement optical confocal microscope.
2 Normative references
The following documents for the application of this document is essential. For dated references, only the dated version applies to this article
Pieces. For undated references, the latest edition (including all amendments) applies to this document.
ISO 25178-600 Geometrical Product Specifications (GPS) - Surface Structures - Area Method Part 600 - Surface Tomography Methods of Measurement (Geometricalproductspecifications (GPS) -Surfacetexture.Areal-Part 600.Metrologi- calcharacteristicsforareal-topographymeasuringmethods)
3 Terms and definitions
The following terms and definitions apply to this document.
3.1 Confocal microscopy confocalmicroscopy; CM
Using constrained illumination and confinement detection, an optical tomographic image is obtained by axial scanning and by extracting the maximum axial signal position
Determination of the surface area of a given sample.
Note. The mask pattern that achieves the illumination and detection constraints may be any mask pattern capable of generating tomographic features, such as single point, multi-point, grid, or slit.
3.2 Lighting pattern
Use a specific graphic structure to define the illumination of the sample being illuminated.
3.3 Detection pattern
The use of a specific graphic structure limits the way in which the detector receives the area of the imaging signal area of the sample.
3.4 Optical chromatography capability
The degree to which the confocal microscope prevents the defocussed optical signal from being received by the detector.
3.5 Plane scanning
The mechanical or optical displacement of the confocal tomography image is obtained in the xy plane.
3.6 Axial scanning of axialscan
A mechanical or optical shift in the optical axis direction (z-direction) results in a change in the in-focus position of the sample.
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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.
Referenced standards
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