GB/T 44926-2024Nanotechnologies—Characterization of micro surface and sub surface—Optical dark-field confocal microscopy (English PDF)

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1: Structure and drafting rules for standardization documents" Drafting.

Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.

This document was proposed by the Chinese Academy of Sciences.

This document is under the jurisdiction of the National Nanotechnology Standardization Technical Committee (SAC/TC279).

This standard was drafted by: Harbin Institute of Technology, China Institute of Metrology, Kunming Institute of Physics, Xi'an Institute of Applied Optics, Beijing Institute of Microelectronics Technology, China Aerospace Science and Industry Corporation Defense Technology Research and Experimental Center.

The main drafters of this standard.

Introduction

The surface and subsurface quality control of micro-nano devices and high-end optical components is an important factor affecting product performance and service life.

Effective characterization of micron and nanometer-scale characteristic structures on the surface and subsurface of the region is an important step in improving the exploration of micro-nano processing and ultra-precision processing mechanisms and processes.

It is an important guarantee for the quality control capability of finalization and mass production, and is widely used in the fields of ultra-smooth optical components, micro-optical devices, semiconductor materials, etc. need.

Optical dark-field confocal microscopy can realize three-dimensional efficient detection of weak dark-field scattering signals on the surface and subsurface of sample micro-areas.

The formulation of this document provides a unified standard for characterizing the surface and subsurface structure of optically transparent solid materials using optical dark-field confocal microscopy.

This method is conducive to improving the detection level of high-performance devices and providing quality control and new process development for the processing and production of precision optical components and micro-nano devices. Provide testing guarantee.

Nanotechnology Micro-area Surface and Sub-surface Characterization Optical dark-field confocal microscopy

1 Scope

This document describes a method for characterizing micro-areas surfaces and sub-surfaces using optical dark-field confocal microscopy.

This document applies to solid materials.

2 Normative references

GB/T 34879-2017

3 Terms and definitions

The terms and definitions defined in GB/T 34879-2017 and the following apply to this document.