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GB/T 24468-2025Test method for semiconductor equipment reliability, availability and maintainability (RAM) (English PDF)

半导体设备可靠性、可用性和维修性（RAM）测量方法

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Issued by

SAMR; SAC

Level / Type

National · Recommended

Issue date

October 5, 2025

Implementation date

May 1, 2026

Scope

GB/T 24468-2025 is the English-translated version of 半导体设备可靠性、可用性和维修性（RAM）测量方法.

GB/T 24468-2025 is the Chinese standard "Test method for semiconductor equipment reliability, availability and maintainability (RAM)". Its scope clause reads: This document describes the measurement methods for the reliability, availability, and maintainability (RAM) of semiconductor devices.

This document applies to the reliability, availability, and maintainability (RAM) testing of semiconductor devices. Its clauses include terms and definitions.

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Document preview — GB/T 24468-2025

National Standard of the People's Republic of China

ICS: 17.040.30
Classification: L 85
Replacing: GB/T 24468-2009

Issued by: State Administration for Market Regulation; Standardization Administration of the PRC

Preface
1.Scope
2 Normative References
3.Terms and Definitions
4.Abbreviations
5 General Principles
6.Classification of the time elapsed by the equipment
6.1 Overview
6.2 Production Time
6.3 Standby time
6.4 Project Time
6.5 Planned downtime
6.6 Unplanned downtime
6.7 Unplanned Time
7.Calculation of RAM Indicator 9.
7.1 Overview
7.2 Equipment Reliability
7.3 Equipment Availability
7.4 Equipment maintainability
7.5 Equipment utilization rate
8.RAM indicator test steps
9.Uncertainty Measurement
9.1 Overview
9.2 Calculation of the lower confidence limit of MTBFp
9.3 Calculation of the upper confidence limit of MTBFp
9.4 Calculation of MTBFp Confidence Interval
9.5 Calculation of the lower confidence limit of MTBFp at zero failures
9.6 Tests to demonstrate that the MTBFp meets the requirements at a given confidence level
10.Measurement of reliability growth or degradation
Appendix A (Normative) Overall Testing of Multi-Process Cluster Equipment
Appendix B (Normative) Confidence Limit Coefficient
Appendix C (Normative) Measurement of Reliability Growth or Degradation

1 Scope

This document describes the measurement methods for the reliability, availability, and maintainability (RAM) of semiconductor devices.

This document applies to the reliability, availability, and maintainability (RAM) testing of semiconductor devices.

2 Normative references

This document has no normative references.

3 Terms and Definitions

The following terms and definitions apply to this document.

3.1 reliability

The possibility that a device will perform its intended function under specified conditions over a period of time.

3.2 availability

When needed, the device is in a state where it can perform its intended functions.

3.3 maintainability

The possibility that a device may remain in or be restored to a state in which it can perform its intended functions for a period of time.

3.4 Cluster device clustertool

A manufacturing system consisting of mechanically interconnected integrated process modules.

Note. These modules may come from different manufacturers.

3.5

A cluster of devices with only one processing flow.

3.6 multi-path cluster tool

Cluster equipment with one or more independent processing steps.

Note. For example, multiple loading ports of the same model, multiple vacuum locks, and multiple process chambers.

3.7 host

Intelligent systems that communicate with equipment on behalf of factories and users, and play a supervisory role.

GB/T 25058 | GB/T 13166 | GA/T 1389 | GB/T 45506 | GB/T 42719 | […]

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 33 pages — is available in the English PDF.

Editions of GB/T 24468

Edition	Title	Revision	Status
GB/T 24468-2025	Test method for semiconductor equipment reliability, availability and maintainability (RAM)	current edition	Current
GB/T 24468-2009	Specification for definition and measurement of semiconductor equipment reliability, availability and maintainability (RAM)	previous edition	In force

This page sells the current edition, GB/T 24468-2025. Earlier editions are listed for reference only.

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