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GB/T 27788-2020Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification (English PDF)

微束分析扫描电镜图像放大倍率校准导则

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Issued by

State Administration for Market Regulation, China National Standardization Administration

Level / Type

National · Recommended

Issue date

June 2, 2020

Implementation date

April 1, 2021

Scope

GB/T 27788-2020 is the English-translated version of 微束分析扫描电镜图像放大倍率校准导则.

GB/T 27788-2020 is the Chinese standard "Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification". Its scope clause reads: This standard specifies the method for calibrating the magnification of scanning electron microscope (SEM) images using appropriate reference materials.

This standard is applicable to the calibration of the magnification determined by the available range of the distance between the calibration reference materials.

This standard does not apply to special length measuring SEM. Its clauses include terms and definitions.

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Document preview — GB/T 27788-2020

National Standard of the People's Republic of China

ICS: 37.020
Classification: N 32

Issued by: State Administration for Market Regulation, China National Standardization Administration

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Image magnification
5 Reference substance
6 Calibration process
7 Image magnification and scale accuracy
8 Calibration report
Appendix A (informative appendix) Reference material for magnification
Appendix B (informative appendix) Parameters affecting the actual magnification of the scanning electron microscope
Appendix C (informative appendix) Uncertainty of magnification measurement
Appendix D (Informative Appendix) Sample Test Report

1 Scope

This standard specifies the method for calibrating the magnification of scanning electron microscope (SEM) images using appropriate reference materials.

This standard is applicable to the calibration of the magnification determined by the available range of the distance between the calibration reference materials.

This standard does not apply to special length measuring SEM.

2 Normative references

The following documents are essential for the application of this document. For dated reference documents, only the dated version applies to this article

Pieces. For the cited documents without date, the latest version (including all amendments) applies to this document.

GB/T 27025-2008 General requirements for the ability of testing and calibration laboratories (ISO /IEC 17025.2005, IDT)

ISO Guide 30 Common Terms and Definitions of Standard Samples (Referencematerials-Selectedtermsanddefinitions)

ISO Guide 34 General requirements for the competence of standard sample producers (General requirements for the competition of ref- erencematerialproducers)

ISO Guide 35 General principles and statistical methods for standard sample setting (Referencematerials-Generaland statisticalprinciplesforcertification)

3 Terms and definitions

The following terms and definitions apply to this document.

3.1 Scanning electron microscope

SEM An instrument that generates a magnified image by scanning the surface of a sample with an electron beam.

3.2 Image

Two-dimensional characterization of the sample surface produced by the scanning electron microscope (3.1).

Note. A sample photo taken with a scanning electron microscope is one type of image.

3.3 Image magnification

The ratio of the linear scale displayed by the image to the corresponding linear scale of the scanned area on the sample.

3.4 Scalemarker

The image (3.2) shows the line segment or interval of the specific actual length on the sample.

3.5 Reference material

RM One or more substances with sufficiently uniform and stable properties have been confirmed to be suitable for use in the measurement process.

GB/T 22062 | GB/T 32387 | GB/T 4315.1 | GB/T 43749 | GB/T 26600 | […]

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 37 pages — is available in the English PDF.

Referenced standards

Normative references

GB/T 27025-2008General requirements for the competence of testing and calibration laboratories

IEC 17025.2005

Cited by

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