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GB/T 33838-2017Microbeam analysis -- Scanning electron microscopy -- Methods of evaluating image sharpness (English PDF)

微束分析扫描电子显微术图像锐度评估方法

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Issued by

General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China

Level / Type

National · Recommended

Issue date

May 31, 2017

Implementation date

April 1, 2018

Scope

GB/T 33838-2017 is the English-translated version of 微束分析扫描电子显微术图像锐度评估方法.

GB/T 33838-2017 is the Chinese national standard for judging how sharp a digital image taken with a scanning electron microscope is, and it is an identical adoption of ISO/TS 24597:2011.

It gives three evaluation methods, the Fourier transform method, the contrast-gradient method and the derivative method, and sets out the steps to be taken when the image is recorded: the sample and its tilt, the field and the pixel size, brightness and contrast, the contrast-to-noise ratio, focusing and astigmatism, outside interference and the image data file.

It defines pixel, pixel size, binary SEM image, convoluted image, sharpness factor and image sharpness, the last two through the standard deviation of a Gaussian distribution.

Normative annexes carry the detail of each method. It was issued on 31 May 2017 and has applied since 1 April 2018.

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Document preview — GB/T 33838-2017

National Standard of the People's Republic of China

ICS: 71.040.40
Classification: G 04

Issued by: General Administration of Quality Supervision, Inspection and Quarantine of the People's Republic of China, Standardization Administration of the People's Republic of China

Preface
1 Scope
2 normative reference document
3 Terms and definitions
4 Step of the SEM image
4.1 Overview
4.2 Sample
4.3 Sample tilt
4.4 field selection
4.5 pixel size selection
4.6 Image brightness and contrast
4.7 Image linings ratio
4.8 image focusing and astigmatism
4.9 External factors interference
4.10 error contrast
4.11 SEM image data file
5 SEM image acquisition and image area selection
6 Evaluation Method
6.1 Overview
6.2 Lining ratio
6.3 Fourier transform (FT) method
6.4 contrast - gradient (CG) method
6.5 Derivative (DR) method
7 Test Report
7.1 Overview
7.2 Test Report Contents
Appendix A (Normative Appendix) Lined Noise Ratio (CNR) Details
Appendix B (Normative Appendix) Fourier Transform (FT) Method Details
Appendix C (Normative Appendix) Contrast - Gradient (CG) Method Details
Appendix D (Normative Appendix) Derivative (DR) Method Details
Appendix E (informative) Background for assessing image sharpness
Appendix F (informative) Characteristics and applicability of the various assessment methods
Appendix G (informative) Method for preparing samples for evaluating image sharpness
Appendix H (informative) Test Report Example
Reference

Foreword

This standard is drafted in accordance with the rules given in GB/T 1.1-2009.

This standard uses the translation method equivalent to ISO/TS 24597:2011 "Micro-beam analysis scanning electron microscopy image sharpness evaluation side law".

And the normative reference in this standard international documents are consistent with the relationship between China's documents are as follows.

Microscopic analysis - Scanning electron microscopy (ISO 22493:2008, IDT) GB/T 21636-2008.

1 Scope

This standard specifies three methods for evaluating the sharpness of digital images generated by scanning electron microscopy (SEM). Fourier transform (FT) Method, contrast - gradient (CG) method, derivative (DR) method.

2 Normative reference documents

The following documents are indispensable for the application of this document. For dated references, only the dated edition applies to this document. For undated references, the latest edition (including all modifications) applies to this document.

GB/T 27025-2008 General requirements for testing and calibration laboratory capabilities (ISO/IEC 17025:2005, IDT)

GB/T 27788-2011 Microbeam analysis Scanning electron microscope image magnification calibration guidelines (ISO 16700:2004, IDT)

ISO 22493 Microbeam analysis - Scanning electron microscopy - Vocabulary

3 Terms and definitions

GB/T 27788-2011 and ISO 22493 are defined and the following terms and definitions apply to this document.

3.1 Pixel

The smallest imaging unit can not be subdivided in the digital SEM image.

3.2 Pixel size

The length of the sample per unit pixel in the SEM image, in nanometer (nm).

Note: The horizontal and vertical pixels should be the same size.

3.3 Binary SEM image

There are only two gray-scale SEM images after conversion.

3.4 Convoluted image

The image obtained by convolution of the binary SEM image and the two - dimensional Gaussian distribution.

3.5 Sharpness factor

(2sigma) for generating the standard deviation of the Gaussian distribution of the convolution image.

3.6 Image sharpness (image clarity)

The sharpness factor is divided by the square root of 2 (ie, 2sigma/2), and the sharpness factor of the SEM image is considered to be equal to the Gaussian distribution with the standard deviation sigma Into the same convolution image.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 70 pages — is available in the English PDF.

Referenced standards

Normative references

ISO 22493

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