GB/T 25184-2010Verification method for X-ray photoelectron spectrometers (English PDF)
X射线光电子能谱仪检定方法
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Issued by
SAMR; SAC
Level / Type
National · Recommended
Issue date
September 26, 2010
Implementation date
August 1, 2011
Scope
GB/T 25184-2010 is the English-translated version of X射线光电子能谱仪检定方法.
GB/T 25184-2010 is the Chinese standard "Verification method for X-ray photoelectron spectrometers". Its scope clause reads: This standard specifies the test methods of X-ray photoelectron spectrometer.
This standard applies to the use of non-monochromatic radiation or Al or MgX AlX monochromatic radiation, and with a sputter ion gun cleaning X-ray photoelectron spectrometer calibration. Its clauses include symbols and abbreviations.
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Document preview — GB/T 25184-2010
National Standard of the People's Republic of China
- ICS
- 71.040.40
- Classification
- G 04
Issued by: State Administration for Market Regulation; Standardization Administration of the PRC
Contents
- 1 Scope
- 2 Normative references
- 3 Symbols and Abbreviations
- 4 principle of the method and system configuration
- 6 test environment
- 7 test items and methods
- 8 report test results
- 9 22 test cycle
1 Scope
This standard specifies the test methods of X-ray photoelectron spectrometer. This standard applies to the use of non-monochromatic radiation or Al or MgX
AlX monochromatic radiation, and with a sputter ion gun cleaning X-ray photoelectron spectrometer calibration.
2 Normative references
The following documents for the application of this document is essential, dated references, only the dated version suitable for use herein
Member. For undated references, the latest edition (including any amendments) applies to this document.
GB/T 19500-2004 X-ray photoelectron spectroscopy analysis General
GB/T 21006-2007 Surface chemical analysis - X-ray photoelectron spectroscopy and Auger electron spectroscopy Linearity of intensity scale (ISO 21270.2004, IDT)
GB/T 22461-2008 Surface chemical analysis - Vocabulary (ISO 18115.2001, IDT)
GB/T 20175-2006 Surface chemical analysis - Sputter depth profiling using layered systems as reference materials optimization method (ISO 14606.2000, IDT)
GB/T 22571-2008 Surface chemical analysis - X-ray photoelectron spectrometer energy scale calibration (ISO 15472.2001,
IDT)
GB/T 25185-2010 Surface chemical analysis of X-ray photoelectron spectroscopy charge control and charge correction method (ISO 19318.2004, IDT)
ISO 15470.1999 Surface chemical analysis - X-ray photoelectron spectrometer instrument performance parameters of the selected representation (Surface
Chemical Analysis-X-ray photoelectron spectrometers-Description of selected instrumental performanceparameters)
ISO 18116 Surface chemical analysis sample preparation and installation procedures Standard Guide (Surfacechemicalanalysis-
Guidelinesforpreparationandmountingofspecimensforanalysis)
ISO 18118.2004 Surface chemical analysis AES and XPS quantitative analysis of homogeneous materials by experimentally determined relative sensitivity factor
User guide (Surfacechemicalanalysis-Augerelectronspectroscopyand X-rayphotoelectron spectroscopy-Guidetotheuseofexperimentalydeterminedrelativesensitivityfactorsforthequantitative analysisofhomogeneousmaterials)
ISO 18516.2006 Surface chemical analysis - Determination of lateral resolution of AES and XPS (Surfacechemicalanalysis-
AugerelectronspectroscopyandX-rayphotoelectronspectroscopy-Determinationoflateralresolution)
ISO 19319 Surface chemical analysis - Determination of AES and XPS lateral resolution, analysis area and analyzer analysis area (Surfacechemicalanalysis-AugerelectronspectroscopyandX-rayphotoelectronspectroscopy-
Determinationoflateralresolution, analysisarea, andsampleareaviewedbytheanalyzer)
ISO 24237 Surface chemical analysis XPS intensity scale repeatability and consistency (Surfacechemicalanalysis-X-ray photoelectronspectroscopy-Repeatabilityandconstancyofintensityscale)
3 Symbols and Abbreviations
The following symbols and abbreviations apply to this document.
GB 31604.35-2016 | GB/T 32055-2015 | GB/T 17519-2013 | GB/T 25187-2024 | GB/T 25186-2010 | GB/T 25185-2010 | […]
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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 20 pages — is available in the English PDF.
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