GB/T 22462-2008Nano, Sub-micron scale film on steel - Quantitative depth profile analysis - Glow discharge atomic emission spectrometry (English PDF)

1 Scope

This standard glow discharge atomic emission spectrometry for quantitative determination of the steel surface nano, submicron thin film (metal oxide coating

Film) in the thickness of the coating mass (per unit area) and the depth distribution of elements in the film.

This method is applicable to the determination of 3nm ~ 1000nm steel surface of the film thickness, the applicable elements include. iron, chromium, nickel, copper, titanium, manganese, aluminum,

Carbon, phosphorus, oxygen, nitrogen and silicon.

2 Normative references

The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent

Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research

Study whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard.

GB/T 6379.1 measurement methods and results of Accuracy (trueness and precision) - Part 1. General principles and definitions

GB/T 6379.2 measurement methods and results of Accuracy (trueness and precision) - Part 2. Determine the standard measurement method to repeat

And basic methods of reproduction

GB/T 19502 Surface chemical analysis - Glow discharge optical emission spectrometry method General

GB/T 20066 Steel and iron - Sampling and determination of the chemical composition of the sample with a sample preparation method

GB/T 22461-2008 Surface chemical analysis - Vocabulary (ISO 18115.2001, IDT)

ISO 5725-3 measurement methods and results of Accuracy (trueness and precision) --- Part 3. Standard Methods of measurement precision

Intermediate measures (Accuracy (truenessandprecision) ofmeasurementmethodsandresults-Part 3. Intermedi- atemeasuresoftheprecisionofastandardmeasurementmethod)

ISO 6955. 1982 - Flame emission spectroscopy analysis, atomic absorption and atomic fluorescence vocabulary (Analyticalspectro- scopicmethods-Flameemission, atomicabsorption, andatomicfluorescence-Vocabulary)

3 Terms and Definitions

In ISO 6955. 1982 terms and definitions and GB/T 22461-2008 given apply to this standard.

Principle 4

The basic principle of glow discharge atomic emission spectrometry as follows.

a) a dc or rf glow light source device, cathode sputtering surface of the sample;

b) by ion sputtering and the energy generated in a glow discharge process the transfer, so that analyte atomization, and then in the plasma

Be excited;

c) The analysis of the elements characteristic spectral line emission intensities measured. When the depth of analysis, emission intensity is recorded as a function of time;

d) In-depth analysis by (quantitative) curve, the intensity function of time into the mass fraction of the sputtering depth letter number. Known by measuring the composition of the reference sample sputtering rate can be established this calibration system.