GB/T 16944-2009Gas for electronic industry -- Nitrogen (English PDF)

Foreword

This standard replaces GB/T 16944-1997 "Electronic industrial gases nitrogen." this standard and GB/T 16944-1997 compared to the main changes are as follows.

--- Modify the scope of the electronics industry with nitrogen application (GB/T 16944-1997 Chapter 1, Chapter 1 of this edition);

--- Modify Normative references (GB/T 16944-1997 of Chapter 2, this version of Chapter 2);

--- Modify the contents of the technical indicators (GB/T 16944-1997 Chapter 3 of this edition, Chapter 3);

--- Modify the electronics industry with nitrogen sampling and decision rules (GB/T 16944-1997 4.1, this version 4.1);

--- Increase in the electronics industry with nitrogen sampling requirements (see Section 4.1.3);

--- Modify hydrogen, oxygen, carbon monoxide, carbon dioxide content analysis method (GB/T 16944-1997 of 4.3,4.4,4.6, Excerpts 4.3);

--- The detection limit of the analytical method to modify the total hydrocarbon (16944-1997 4.7, this version 4.4);

--- Modify moisture content analysis method (GB/T 16944-1997 4.5, this version 4.6);

--- Modify signs, packaging, storage and security (GB/T 16944-1997 of Chapter 5, Chapter 5 of this edition);

--- Increase Normative Appendix A, and the determination of the electronics industry with nitrogen, hydrogen, oxygen, carbon monoxide, carbon dioxide content of the written method Appendix (see Appendix A).

Appendix A of this standard is a normative appendix.

This standard by the National Standardization Technical Committee of semiconductor equipment and materials proposed.

The standard equipment by the National Standardization Technical Committee and the semiconductor material gas partial Technical Committee.

This standard was drafted. China Institute of Metrology, Southwest Chemical Industry Research and Design Institute.

1 Scope

This standard specifies the technical requirements of the electronics industry with nitrogen gas, test methods and packaging, labeling, storage and security.

This standard applies to cryogenic air extracted from the gaseous and liquid nitrogen, and nitrogen obtained by electrochemical methods. They are large Scale manufacture of integrated circuits used to protect the purge, cover, pressure, chemical vapor deposition and the like.

Molecular formula. N2.

Molecular Weight. 28.0134 (according to 2005 international relative atomic mass calculation).

2 Normative references

The following documents contain provisions which, through reference in this standard and become the standard terms. For dated references, subsequent Amendments (not including errata content) or revisions do not apply to this standard, however, encourage the parties to the agreement are based on research Whether the latest versions of these documents. For undated reference documents, the latest versions apply to this standard.

GB 190 packaging and marking of dangerous goods GB/T 3723 Sampling of chemical products for industrial use General Safety GB/T 3864 industrial nitrogen GB 5099 seamless steel gas cylinders (GB 5099-1994, neqISO 4705.1993) GB 7144 cylinders color logo GB/T 8984 of carbon monoxide, carbon dioxide and hydrocarbons by gas chromatography GB 14194 permanent gas cylinders GB 16912 Deep frozen production of oxygen and related gas safety technical regulations JB/T 5905 multi-layer vacuum insulated cryogenic liquid containers JB/T 6897 cryogenic liquid tanker JB/T 6898 cryogenic liquid storage equipment safety rules Gas Cylinder Safety Supervision Pressure Vessel Safety Technology Supervision Pressure pipeline safety management and monitoring requirements

3 Technical requirements

Electronic industrial quality gas nitrogen shall conform to the requirements of Table 1.

Table 1 Technical Specifications

Item Index

Nitrogen (N2) purity (volume fraction)/10-2 >= 99.9999 99.9996 Hydrogen (H2) content (volume fraction)/10-6