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JB/T 8945-2010Vacuum sputtering coating plant (English PDF)

真空溅射镀膜设备

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Issued by

MIIT

Level / Type

Industry · Recommended

Issue date

February 11, 2010

Implementation date

July 1, 2010

Scope

JB/T 8945-2010 is the English-translated version of 真空溅射镀膜设备.

JB/T 8945-2010 is a recommended Chinese machinery industry standard for vacuum sputtering coating plant. It fixes the equipment and its basic parameters, the technical requirements, the test methods, the inspection rules and the marking, packaging, transport and storage.

It applies to vacuum sputtering equipment working in the pressure range from 1 x 10^-1 Pa to 1 x 10^-3 Pa. It replaces JB/T 8945-1999 and was issued by the Ministry of Industry and Information Technology.

Among the standards it quotes are GB/T 191, GB/T 6070, GB/T 11164-1999, GB/T 13306, JB/T 1090, JB/T 1091, JB/T 1092 and JB/T 7673. It carries Chinese classification J78 with international classification 23.160.

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Document preview — JB/T 8945-2010

National Standard of the People's Republic of China

ICS
23.160
Replacing
JB/T 8945-1999

Issued by: Ministry of Industry and Information Technology of the People's Republic of China

Contents

  • Foreword
  • Scope
  • Normative references
  • About this standard
  • Related standards
  • Classification and status

1 Foreword

JB/T 8945-2010 was issued by MIIT on 11 February 2010 and has been in force since 1 July 2010.

It replaces the earlier edition JB/T 8945-1999.

2 Scope

This standard is a recommended Chinese machinery industry standard for vacuum sputtering coating plant. It fixes the equipment and its basic parameters, the technical requirements, the test methods, the inspection rules and the marking, packaging, transport and storage. It applies to vacuum sputtering equipment working in the pressure range from 1 x 10^-1 Pa to 1 x 10^-3 Pa. It replaces JB/T 8945-1999 and was issued by the Ministry of Industry and Information Technology. Among the standards it quotes are GB/T 191, GB/T 6070, GB/T 11164-1999, GB/T 13306, JB/T 1090, JB/T 1091, JB/T 1092 and JB/T 7673. It carries Chinese classification J78 with international classification 23.160.

3 Normative references

JB/T 8945-2010 cites the following standards, which apply in full or in part through the references made to them in its clauses.

GB/T 191

GB/T 6070

GB/T 11164-1999

GB/T 13306

JB/T 1090

JB/T 1091

JB/T 1092

JB/T 7673

4 About this standard

Issued by: MIIT

English translation: about 15 pages

5 Related standards

Other editions:

JB/T 8945-1999 (earlier edition)

6 Classification and status

International classification (ICS): 23.160

Prefix JB/T: recommended standard.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.

Referenced standards

Similar standards

Editions of JB/T 8945

EditionTitleRevisionStatus
JB/T 8945-2010Vacuum sputtering coating plantcurrent editionCurrent
JB/T 8945-1999Vacuum sputtering coating plantprevious editionSuperseded

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