GB/Z 42625-2023Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement (English PDF)

GB/Z 42625-2023 (Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement) is available as an English-translated PDF.

GB/Z 42625-2023 is the Chinese standard "Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement".

Its scope clause reads: This document specifies the characteristics of a quadrupole mass spectrometer whose ion source is of the electron bombardment type and whose atoms have a small mass-to-charge ratio (m/z) at 300: This document does not apply to quadrupole mass spectrometers equipped with other types of ion sources, such as chemical ionization, photoionization, or field Ionization-type ion sources are also not suitable for analysis and measurement of quadrupole mass spectrometers with large mass-to-charge ratios (m/z), which are mainly used to detect organic materials: According to published literature, the metrological characteristics of a quadrupole mass spectrometer depend on the instrument settings, total pressure and gas mixture composition, so Therefore, it is impractical to calibrate a quadrupole mass spectrometer for all application conditions: The characterization methods specified in this document include vacuum system Continuous leak monitoring, leak rate measurement with tracer gas, residual gas analysis and material outgassing rate testing: Users can choose to suit their needs Other application situations can also refer to the characteristic method of this document: It is known that the stability of some parameters of quadrupole mass spectrometer is poor, especially the sensitivity: Therefore, the calibrated parameters, when higher accuracy is required, still Repeated recalibration is required: Under actual working conditions, it can only be calibrated on site: Therefore, this document not only describes the capabilities of a calibration laboratory or national metrology institute: How to calibrate a quadrupole mass spectrometer with direct traceability to the International System of Units (SI), and describes how the calibrated can be inspected and maintained in the field parameter: According to its physical principle, quadrupole mass spectrometer needs high vacuum environment: By reducing the inlet size or by using a special ion source in combination with a split flow pump Combined, the operating range of a quadrupole mass spectrometer can be extended to higher pressures, up to atmospheric pressure: However, this document does not apply to Gas technology quadrupole mass spectrometer: Therefore, the pressure range at the inlet of the quadrupole mass spectrometer in this document does not exceed 1Pa: This document does not specify how the manufacturer or distributor should adjust the initial parameters of the quadrupole mass spectrometer, these initial parameters are mainly used to provide An exact m/z, constant mass resolving power or constant transmission probability, these are the fundamental parameters of the device: Conversely, this document has by default A parameter readjustment program provided by the manufacturer, the user can readjust the parameters in the field: This procedure is designed to ensure the characteristics of the quadrupole mass spectrometer The parameters are all in the optimal state: This document is intended to allow users to obtain the best metrological results from their quadrupole mass spectrometer: The survey found that, in most cases, the ability to scan This effect is obtained in "mode": Histograms may also exhibit adequate metrological characteristics, depending on the software used for Evaluate data acquired by a quadrupole mass spectrometer: However, on the mass scale, a shift in the peak position causes a change in the ion current, which can be seen in the mass spectrum introduce additional uncertainty: Therefore, scan mode is superior to most of the measurement procedures in this document: It is not the purpose of this document to determine all parameters for each quadrupole mass spectrometer: However, to specify or measure the parameter values in this document (For example, for inspection and testing), it is necessary to follow the procedures specified in this document: This document assumes that the user is familiar with the operation of a quadrupole mass spectrometer, as well as high vacuum and ultra-high vacuum techniques:.

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This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 42 pages — is available in the English PDF.

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