GB/T 8763-2020Test methods for gas absorption characteristic of non-evaporation gettering materials and products (English PDF)

Foreword

This standard was drafted in accordance with the rules given in GB/T 1.1-2009.

This standard replaces GB/T 8763-1988 "Non-evaporable getter materials and products test method for getter performance". This standard and Compared with GB/T 8763-1988, except for editorial changes, the main technical changes are as follows.

--- Modified the content of the scope (see Chapter 1, the first paragraph of the 1988 edition);

--- Added normative references (see Chapter 2);

--- Added terms and definitions (see Chapter 3);

--- Modified the content of the principle (see Chapter 4, Chapter 1 of the 1988 edition);

--- The purity of carbon monoxide gas was changed from "99.5%" to "purity not less than 99.99%" (see Chapter 3 of 5.3, 1988 edition);

--- Modified the requirements of the vacuum system (see 6.1, 2.1 in the 1988 edition);

---Ultra-high vacuum measurement range is modified from "10-2Pa~10-8Pa" to "1 x 10^-1Pa~5 x 10^-8Pa" (see 6.4, 1988 edition 2.4);

--- Modified the sample heating method (see 6.5, 2.5 in the 1988 edition);

---The heating rate is changed from "1°C/s, 1.5°C/s, 3°C/s optional" to "1°C/s~3°C/s" (see 6.5, 1988 edition 2.5);

--- Deleted the pressure automatic control system (see 1988 version 2.6);

--- Modified strip sample requirements (see 7.1.1, 4.1 in 1988 edition);

--- Added infrared temperature measurement samples (see 7.1.2);

--- Modified the test preparation (see 8.1, 5.1 in 1988 edition);

--- Added test report (see Chapter 10).

1 Scope

This standard specifies zirconium-aluminum alloy powder for vacuum devices, zirconium-aluminum alloy rings and sheets for gettering, zirconium-aluminum alloy composite strip for gettering, release Inspiratory velocity of non-evaporable getter materials and products such as titanium mercury-zirconium aluminum alloy composite strip for mercury gettering, zirconium graphite materials and products for room temperature gettering Test methods for rate and inspiratory volume, processing of test results and test reports.

This standard applies to zirconium-aluminum alloy powder for vacuum devices, zirconium-aluminum alloy rings and sheets for gettering, zirconium-aluminum alloy composite strips for gettering, release Inspiratory velocity of non-evaporable getter materials and products such as titanium mercury-zirconium aluminum alloy composite strip for mercury gettering, zirconium graphite materials and products for room temperature gettering Determination of rate and inspiratory volume.

2 Normative references

The following documents are essential for the application of this document. For dated reference documents, only the dated version applies to this document. For the cited documents without date, the latest version (including all amendments) applies to this document.

GB/T 4314 getter terminology

GB/T 8170 Numerical Rounding Rules and Representation and Judgment of Limit Values

3 Terms and definitions

The terms and definitions defined in GB/T 4314 apply to this document.

4 Principle

When the test vacuum system is in the state of molecular flow, the gas flows through the conductance element of known conductance.

There is a pressure difference across the flow conducting element. Adopt "constant pressure method", constant pressure at one end, test the change value of pressure at the other end with time, through calculation The inspiratory rate and inspiratory volume can be derived.

5 Materials

5.1 Hydrogen (volume fraction is not less than 99.999%).

5.2 Nitrogen (volume fraction is not less than 99.999%).

5.3 Carbon monoxide (volume fraction is not less than 99.99%).

6 Instruments

6.1 The vacuum system as shown in Figure 1 should meet the following requirements.

---Vacuum ball diameter 100mm~160mm;

--- The conductance value of the conductance element should be selected so that when the intake chamber has the maximum inhalation rate, the test gas still passes through the conductance in the state of molecular flow