GB/T 5252-2020Test method for dislocation density of monocrystal germanium (English PDF)

1 Scope

This standard specifies the test method for the dislocation density of germanium single crystal.

This standard is applicable to the test of dislocation density of germanium single crystals on {111}, {100} and {113} planes. The test range is 0cm-2~100000cm-2.

2 Normative references

The following documents are essential for the application of this document. For dated reference documents, only the dated version applies to this article

Pieces. For the cited documents without date, the latest version (including all amendments) applies to this document.

GB/T 8756 Germanium crystal defect map

GB/T 14264 Terminology of semiconductor materials

3 Terms and definitions

The terms and definitions defined in GB/T 8756 and GB/T 14264 apply to this document.

4 Method principle

The lattice around the dislocation in the germanium single crystal will be distorted. When some chemical etchant is used to etch the crystal surface, the dislocation on the crystal surface

The corrosion speed is faster at the outcrop, and then the corrosion pit with a specific shape is formed. Observe under a microscope and count these according to certain rules

The corrosion pits of a particular shape, the number of corrosion pits per unit field of view area is the dislocation density.

5 Reagents and materials

Unless otherwise specified, only reagents confirmed to be analytically pure and above are used in the test analysis, and the resistivity of the water used is not less than 12Mohm·cm.