GB/T 46697-2025Electronic grade octamethylcyclotetrasiloxane (English PDF)

1 Scope

This document specifies the technical requirements, inspection rules, packaging, marking, and accompanying documentation for electronic-grade octamethylcyclotetrasiloxane used in the semiconductor industry.

The requirements for materials, transportation, storage, and safety warnings are described, along with the corresponding testing methods.

This document applies to electronic-grade octamethylcyclotetrasiloxane for depositing silicon-based films such as silicon oxide, carbon-oxygen-doped silicon, and silicon carbide, due to its excellent...

Insulation and high temperature resistance are used in the semiconductor field as packaging isolation layers, integrated circuit insulating layers, and dielectric layers.

2 Normative references

The contents of the following documents, through normative references within the text, constitute essential provisions of this document. Dated citations are listed below.

For references to documents, only the version corresponding to that date applies to this document; for undated references, the latest version (including all amendments) applies.

This document.

GB 190 Packaging Marks for Dangerous Goods

GB/T 3723 General Safety Rules for Sampling of Industrial Chemical Products

GB/T 6324.8 Test methods for organic chemical products – Part 8.Determination of moisture content in liquid products – Karl Fischer coulometric method

GB/T 6680 General Rules for Sampling of Liquid Chemical Products

GB/T 11446.1 Electronic Grade Water

GB 12463 General Technical Requirements for Transport Packaging of Dangerous Goods

GB 15258 Regulations for Writing Safety Labels for Chemicals

GB 15603 General Rules for Storage of Hazardous Chemicals in Warehouses

GB/T 16483-2008 Contents and Item Order of Safety Data Sheets for Chemicals

GB/T 17519-2013 Guidelines for the Preparation of Safety Data Sheets for Chemicals

GB/T 25915.1 Cleanrooms and related controlled environments – Part 1.Classification of air cleanliness levels by particle concentration

GB/T 26793 Coulometric Moisture Analyzer

GB/T 32566 Stainless Steel Welded Gas Cylinders

GB/T 37837 General Rules for Quadrupole Inductively Coupled Plasma Mass Spectrometry

SJ/T 11637 General Rules for Inductively Coupled Plasma Mass Spectrometry of Electronic Chemicals

SJ/T 11638 Test methods for particulate matter in electronic chemicals

3 Terms and Definitions

This document does not contain any terms or definitions that need to be defined.

4 Technical Requirements

Electronic grade octamethylcyclotetrasiloxane should conform to the specifications in Table 1. […]