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GB/T 43725-2024Direct writing imaging exposure equipment (English PDF)

直写成像式曝光设备

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Issued by

SAMR; SAC

Level / Type

National · Recommended

Issue date

March 15, 2024

Implementation date

October 1, 2024

Scope

GB/T 43725-2024 is the English-translated version of 直写成像式曝光设备.

GB/T 43725-2024 is the Chinese national standard covering direct writing imaging exposure equipment. Issued on 15 March 2024, it has been in force since 1 October 2024.

Document preview — GB/T 43725-2024

National Standard of the People's Republic of China

ICS: 31.260
Classification: L 97

Issued by: State Administration for Market Regulation; Standardization Administration of the PRC

PrefaceIII
1 Scope1
2 Normative references1
3 Terms and Definitions1
4 Classification and structure3
5 Technical Requirements4
6 Test Methods8
7 Inspection Rules11
8 Identification, marking, packaging, transportation and storage12
9 Product Random Documents13

Foreword

This document is in accordance with the provisions of GB/T 1.1-2020 "Guidelines for standardization work Part 1: Structure and drafting rules for standardization documents" Drafting.

Please note that some of the contents of this document may involve patents. The issuing organization of this document does not assume the responsibility for identifying patents.

This document was proposed and coordinated by the National Technical Committee for Semiconductor Equipment and Materials Standardization (SAC/TC203).

This document was drafted by: Hefei Xingji Microelectronics Equipment Co., Ltd., Guangzhou Xinsen Quick Circuit Technology Co., Ltd., Anhui Provincial Industry and Information Technology Research Institute, Shenzhen South Circuit Co., Ltd., Sitron Electronics Co., Ltd., China Electronics Technology Standardization Institute, Hefei SiMai Microelectronics Technology Co., Ltd., Shenzhen Kronos Technology Co., Ltd., Shenzhen Baibohe Technology Co., Ltd.

The main drafters of this document are: He Shaofeng, Chen Xin, Qiu Xingya, Qiao Shuxiao, Shen Guizhen, Zhu Ying, Chen Liyang, Fang Lin, Qu Lujie, Xu Jingping, Chen Dong, Cui Liangduan, Lu Peiliang, Wu Yiran, Cao Kewei, Zhao Junsha, Li Xiangbin, Yan Xiaonian, Lu Nan, Li Na, Li Zhaohui, Wu Xinmin.

Direct writing imaging exposure equipment

1 Scope

This document specifies the classification and structure, technical requirements, inspection rules, marking, packaging, transportation and storage of direct writing imaging exposure equipment and The requirements for the product random documents describe the test methods, including general test conditions, appearance and dimensional inspection, performance tests, safety tests and Noise test.

This document applies to the design, development, verification, manufacture, use and maintenance of direct-write imaging exposure equipment for printed circuit boards and integrated circuit packaging substrates. Use and inspection processes.

2 Normative references

GB/T 191

GB/T 2893.2

GB/T 3768

GB/T 3785.1

GB/T 5226.1-2019

GB/T 6388

GB/T 13306

GB/T 13384

GB/T 16471

GB/T 18209.2-2010

3 Terms and definitions

The terms and definitions defined in SJ/T 10668-2023 and the following apply to this document.

3.1

A device that uses light reflection, electro-optical interaction, acousto-optical interaction, etc. to change the direction of light propagation or energy distribution.

3.2

A technology that uses a laser diode, light-emitting diode or other light source to scan a beam through a spatial light modulator (3.1).

3.3 Resolution

In optical exposure imaging, the minimum graphic size that can produce a clear image by an exposure device or a photosensitive material such as a photoresist.

......
This preview omits tables, figures, formulas and parts of the technical clauses. The complete document — 15 pages — is available in the English PDF.

Referenced standards

Normative references

GB/T 2893.2 · GB/T 3768 · GB/T 3785.1 · GB/T 5226.1-2019 · GB/T 6388 · GB/T 18209.2-2010

Editions of GB/T 43725

Edition	Title	Revision	Status
GB/T 43725-2024	Direct writing imaging exposure equipment	current edition	Current

This page sells the current edition, GB/T 43725-2024. Earlier editions are listed for reference only.

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