GB/T 42676-2023Test method for crystalline quality of semiconductive single crystal—X-ray diffraction method (English PDF)

Foreword

This document complies with the provisions of GB/T 1.1-2020 "Standardization Work Guidelines Part 1: Structure and Drafting Rules of Standardization Documents" Drafting.

1 Scope

This document describes the use of X-ray diffractometer to test the half-maximum width of the rocking curve of double crystals of semiconductor materials, and then evaluate the semiconductor single crystal. quality approach.

This document is suitable for testing the crystal quality of single crystal materials such as silicon carbide, diamond, and gallium oxide, and semiconductor materials such as silicon, gallium arsenide, and indium phosphide.

The test of material crystal quality can also be performed with reference to this document.

2 Normative reference documents

The contents of the following documents constitute essential provisions of this document through normative references in the text. Among them, the dated quotations For undated referenced documents, only the version corresponding to that date applies to this document; for undated referenced documents, the latest version (including all amendments) applies to this document.

GB/T 14264 Semiconductor material terminology

GB/T 14666 Analytical Chemistry Terminology

GB/T 32267 Terminology for performance measurement of analytical instruments

3 Terms and definitions

The following terms and definitions as defined in GB/T 14264, GB/T 14666 and GB/T 32267 apply to this document.

4 Principles

4.1 The atoms of a single crystal are arranged in a three-dimensional periodic structure. The crystal can be regarded as a series of parallel atoms arranged at a vertical distance d in space.

Formed by a plane, when a beam of parallel monochromatic X-rays is incident on the plane, and the optical path difference between the X-rays shining on adjacent planes is its wavelength

When it is an integer multiple of n times, diffraction (reflection) will occur. When the angle theta between the incident beam and the reflection plane, the X-ray wavelength lambda, and the interplanar spacing When d and diffraction order n simultaneously satisfy Bragg's theorem 2dsintheta=nlambda, the X-ray diffraction beam intensity will reach the maximum value, and theta at this time is […]